Issued Patents All Time
Showing 51–75 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6054181 | Method of substrate processing to form a film on multiple target objects | Mitsuhiro Nanbu, Naruaki Iida, Hideaki Gotou, Masanori Tateyama, Yuji Yoshimoto +6 more | 2000-04-25 |
| 6052284 | Printed circuit board with electronic devices mounted thereon | Kazunari Suga | 2000-04-18 |
| 5992361 | Variable valve timing mechanism | Shinichi Murata, Jun Isomoto | 1999-11-30 |
| 5978218 | Cooling system for IC tester | Jun Midorikawa | 1999-11-02 |
| 5964954 | Double-sided substrate cleaning apparatus and cleaning method using the same | Hiroyuki Matsukawa, Akira Yonemizu, Michiaki Matsushita, Takashi Takekuma, Hidetami Yaegashi +1 more | 1999-10-12 |
| 5960225 | Substrate treatment apparatus | — | 1999-09-28 |
| 5952842 | Test head cooling system | — | 1999-09-14 |
| 5942035 | Solvent and resist spin coating apparatus | Keizo Hasebe, Hiroichi Inada, Hiroyuki Iino, Shinzi Kitamura, Masatoshi Deguchi +1 more | 1999-08-24 |
| 5939139 | Method of removing coated film from substrate edge surface and apparatus for removing coated film | — | 1999-08-17 |
| 5767690 | Test head cooling system | — | 1998-06-16 |
| 5749046 | Signal level measuring apparatus for directing an antenna toward a satellite | Minoru Ohta | 1998-05-05 |
| 5725664 | Semiconductor wafer processing apparatus including localized humidification between coating and heat treatment sections | Mitsuhiro Nanbu, Naruaki Iida, Hideaki Gotou, Masanori Tateyama, Yuji Yoshimoto +6 more | 1998-03-10 |
| 5704316 | Valve drive system of an internal combustion engine | Shinichi Murata, Jun Isomoto, Noriyuki Miyamura, Hirofumi Higashi | 1998-01-06 |
| 5686143 | Resist treating method | Hiroyuki Matsukawa, Akira Yonemizu, Michiaki Matsushita, Takashi Takekuma, Hidetami Yaegashi +1 more | 1997-11-11 |
| 5672205 | Coating apparatus | Yasuhiro Sakamoto | 1997-09-30 |
| 5665200 | Substrate processing method and substrate processing apparatus | Takashi Takekuma, Kiyomi Sonobe | 1997-09-09 |
| 5658615 | Method of forming coating film and apparatus therefor | Keizo Hasebe, Hiroichi Inada, Hiroyuki Iino, Shinzi Kitamura, Masatoshi Deguchi +1 more | 1997-08-19 |
| 5644248 | Test head cooling system | — | 1997-07-01 |
| 5580607 | Coating apparatus and method | Takashi Takekuma, Masaaki Murakami, Masatoshi Deguchi | 1996-12-03 |
| 5565034 | Apparatus for processing substrates having a film formed on a surface of the substrate | Mitsuhiro Nanbu, Naruaki Iida, Hideaki Gotou, Masanori Tateyama, Yuji Yoshimoto +6 more | 1996-10-15 |
| 5518542 | Double-sided substrate cleaning apparatus | Hiroyuki Matsukawa, Akira Yonemizu, Michiaki Matsushita, Takashi Takekuma, Hidetami Yaegashi +1 more | 1996-05-21 |
| 5312487 | Coating apparatus | Masami Akimoto, Haruo Iwatsu | 1994-05-17 |
| RE32694 | Separation of cobalt and nickel by solvent extraction | Isami Miura, Kazuo Noguchi | 1988-06-14 |
| 4582691 | Process for separating Fe(III) from an aqueous solution of metallic salts and a process for separating Fe(III) from an organic extraction solvent | Isami Miura, Tadanori Matsumura | 1986-04-15 |
| 4196076 | Separation of cobalt and nickel by solvent extraction | Isami Miura, Kazuo Noguchi | 1980-04-01 |