Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10428438 | Substrate processing method and template | Tomohisa Hoshino, Toshiyuki Matsumoto | 2019-10-01 |
| 10294575 | Electric field treatment method and electric field treatment device | — | 2019-05-21 |
| 10036095 | Electrolytic treatment method and electrolytic treatment apparatus | Hidenori Akiyama | 2018-07-31 |
| 9087771 | Method for manufacturing semiconductor device, semiconductor device and jig for forming wiring | Toshiyuki Matsumoto | 2015-07-21 |
| 8664106 | Method of manufacturing semiconductor device | — | 2014-03-04 |
| 6268900 | Accommodating apparatus and substrate processing system | — | 2001-07-31 |
| 5312487 | Coating apparatus | Masami Akimoto, Akihiro Fujimoto | 1994-05-17 |
| 5127362 | Liquid coating device | Yasuhiro Sakamoto, Junro Iwakiri | 1992-07-07 |