Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665596 | Self aligned active trench contact | — | 2020-05-26 |
| 10134746 | Self aligned active trench contact | — | 2018-11-20 |
| 9640539 | Self aligned active trench contact | — | 2017-05-02 |
| 9245894 | Self aligned active trench contact | — | 2016-01-26 |
| 8728945 | Method for patterning sublithographic features | — | 2014-05-20 |
| 7250334 | Metal insulator metal (MIM) capacitor fabrication with sidewall spacers and aluminum cap (ALCAP) top electrode | Darius Crenshaw, Byron Lovell Williams, Alwin Tsao, Hisashi Shichijo, Satyavolu S. Papa Rao +1 more | 2007-07-31 |
| 7160799 | Define via in dual damascene process | Thomas Wolf, Allen Yen | 2007-01-09 |
| 6989602 | Dual damascene process with no passing metal features | — | 2006-01-24 |
| 6879046 | Split barrier layer including nitrogen-containing portion and oxygen-containing portion | Gerald W. Gibson, Scott Jessen, Kurt G. Steiner, Susan Clay Vitkavage | 2005-04-12 |
| 6555910 | Use of small openings in large topography features to improve dielectric thickness control and a method of manufacture thereof | Robert A. Ashton, Mary Roby, Morgan J. Thoma, Daniel J. Vitkavage | 2003-04-29 |
| 6362638 | Stacked via Kelvin resistance test structure for measuring contact anomalies in multi-level metal integrated circuit technologies | Robert A. Ashton, Mary Roby, Daniel J. Vitkavage | 2002-03-26 |
| 6329281 | Methods for fabricating a multilevel interconnection for an integrated circuit device utilizing a selective overlayer | Mary Roby, Daniel J. Vitkavage | 2001-12-11 |
| 6218085 | Process for photoresist rework to avoid sodium incorporation | Simon John Molloy, Nace Layadi, Allen Yen, Brian D. Crevasse | 2001-04-17 |
| 5891784 | Transistor fabrication method | Wan Yee Cheung, Sailesh Chittipeddi, Chong-Cheng Fu, Taeho Kook, Avinoam Kornblit +2 more | 1999-04-06 |
| 5712176 | Doping of silicon layers | Yaw S. Obeng, Eric John Persson | 1998-01-27 |
| 5100827 | Buried antifuse | — | 1992-03-31 |