Issued Patents All Time
Showing 51–65 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8046860 | System and method for removing particles in semiconductor manufacturing | Chen-Yuan Hsia, Chang-Cheng Hung, Chi-Lun Lu, Shih-Ming Chang, Yen-Bin Huang +2 more | 2011-11-01 |
| 7824316 | Punching bag | Yu-Hsiang Wang | 2010-11-02 |
| 7819980 | System and method for removing particles in semiconductor manufacturing | Chen-Yuan Hsia, Chang-Cheng Hung, Chi-Lun Lu, Shih-Ming Chang, Yen-Bin Huang +2 more | 2010-10-26 |
| 7796249 | Mask haze early detection | Shy-Jay Lin, Te-Chih Huang, Chih-Ming Ke, Wei-Yu Su, Heng-Hsin Liu +2 more | 2010-09-14 |
| 7759136 | Critical dimension (CD) control by spectrum metrology | Chang-Cheng Hung, Hung-Chang Hsieh, Shih-Ming Chang, Chi-Lun Lu, Allen Hsia +1 more | 2010-07-20 |
| 7722997 | Holographic reticle and patterning method | Shih-Ming Chang, Chung-Hsing Chang, Chih-Cheng Chin, Chi-Lun Lu, Sheng-Chi Chin +1 more | 2010-05-25 |
| 7697114 | Method and apparatus for compensated illumination for advanced lithography | Shih-Ming Chang, Chih-Cheng Chin, Chi-Lun Lu, Sheng-Chi Chin, Hung-Chang Hsieh | 2010-04-13 |
| 7474788 | Method and system for enhancing image resolution using a modification vector | Shih-Ming Chang, Jan-Wen You | 2009-01-06 |
| 7460251 | Dimension monitoring method and system | Shih-Ming Chang, Chen-Yuan Hsia, Chi-Lun Lu, Yen-Bin Huang, Chang-Cheng Hung +4 more | 2008-12-02 |
| 7383530 | System and method for examining mask pattern fidelity | Shih-Ming Chang, Chih-Cheng Chin, Chi-Lun Lu, Sheng-Chi Chin, Hung-Chang Hsieh | 2008-06-03 |
| 7316872 | Etching bias reduction | Shih-Ming Chang, Chih-Cheng Chin, Chi-Lun Lu, Sheng-Chi Chin | 2008-01-08 |
| 7312021 | Holographic reticle and patterning method | Shih-Ming Chang, Chung-Hsing Chang, Chih-Cheng Chin, Chi-Lun Lu, Sheng-Chi Chin +1 more | 2007-12-25 |
| 7060400 | Method to improve photomask critical dimension uniformity and photomask fabrication process | Shih-Ming Chang, Chih-Chen Chin, Chi-Lun Lu, Sheng-Chi Chin, Hung-Chang Hsieh | 2006-06-13 |
| 6721939 | Electron beam shot linearity monitoring | Tyng-Hao Hsu, Chin-Hsiang Lin | 2004-04-13 |
| 6379849 | Method for forming binary intensity masks | Shy-Jay Lin | 2002-04-30 |