Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7469057 | System and method for inspecting errors on a wafer | Chang-Cheng Hung, Hung-Chang Hsieh, Hsen-Lin Wu | 2008-12-23 |
| 7162071 | Progressive self-learning defect review and classification method | Chang-Cheng Hung, Chin-Hsiang Lin, Chuan-Yuan Lin, Shin-Ying Chen | 2007-01-09 |
| 7035449 | Method for applying a defect finder mark to a backend photomask making process | Chang-Cheng Hung, Chuan-Yuan Lin, Shu-Chun Lin, Chin-Hsiang Lin | 2006-04-25 |
| 6858353 | Increased-contrast film for high-transmittance attenuated phase-shaft masks | Chia-Yang Chang, Chang-Cheng Hung, Chin-Hsiang Lin | 2005-02-22 |
| 6721939 | Electron beam shot linearity monitoring | Wen-Chuan Wang, Chin-Hsiang Lin | 2004-04-13 |
| 6127075 | Method for checking accuracy of a measuring instrument for overlay registration | — | 2000-10-03 |