SP

Sheng-Liang Pan

TSMC: 63 patents #490 of 12,232Top 5%
Overall (All Time): #35,146 of 4,157,543Top 1%
63
Patents All Time

Issued Patents All Time

Showing 26–50 of 63 patents

Patent #TitleCo-InventorsDate
10755978 Shared contact structure and methods for forming the same Leo Hsu 2020-08-25
10535524 Tuning threshold voltage through meta stable plasma treatment Shao-Jyun Wu, Huan-Just Lin 2020-01-14
10510600 Shared contact structure and methods for forming the same Leo Hsu 2019-12-17
10510553 Dry ashing by secondary excitation Jack Kuo-Ping Kuo, Chia-Yang Hung, Jyu-Horng Shieh, Shu-Huei Suen, Syun-Ming Jang 2019-12-17
7838386 Method and system for patterning alignment marks on a transparent substrate Ruei-Hung Jang, Ya-Wen Lee, Tzu-Yang Wu, Chin-Hsiang Lin, Tsai-Sheng Gau 2010-11-23
7611960 Method and system for wafer backside alignment Sheng-Chieh Liu, Chia-Hung Kao, Tzu-Yang Wu, Yuan-Bang Lee 2009-11-03
7450296 Method and system for patterning alignment marks on a transparent substrate Ruei-Hung Jang, Ya-Wen Lee, Tzu-Yang Wu, Chin-Hsiang Lin, Tsai-Sheng Gau 2008-11-11
7180651 Spacer fabrication process for manufacturing reflective stealth mirrors and other MEMS devices Shan-Hua Wu, Fei-Yun Chen, Wei-Ya Wang, Hung-Hsin Liu 2007-02-20
7071032 Material to improve image sensor yield during wafer sawing Hung-Jen Hsu, Yu-Kung Hsiao, Chih-Kung Chang, Fu-Tien Weng 2006-07-04
7009772 High transmittance overcoat for microlens arrays in semiconductor color imagers Yu-Kung Hsiao, Bii-Juno Chang, Kuo-Liang Lu 2006-03-07
6971270 Method and apparatus for measuring gripping strength of a vacuum wand Ruei-Hung Jang, Chih-Lin Ying, Tsung-Chi Hsieh, Ching-Hui Tai 2005-12-06
6926818 Method to enhance the adhesion between dry film and seed metal Yih-Ann Lin, Tung-Heng Shie, Kai-Ming Ching, Kuo-Liang Lu 2005-08-09
6911097 Photoresist stripper using nitrogen bubbler Chie-Chi Chen, Wen-Hsiang Tseng, Jen-Shiang Fang 2005-06-28
6878642 Method to improve passivation openings by reflow of photoresist to eliminate tape residue Hung-Jen Hsu, Yu-Kung Hsiao, Chih-Kung Chang, Kuo-Liang Lu 2005-04-12
6849533 Method for fabricating microelectronic product with attenuated bond pad corrosion Chih-Kung Chang, Yu-Kung Hsiao, Fu-Tien Wong, Chin-Chen Kuo, Chung-Sheng Hsiung +4 more 2005-02-01
6821810 High transmittance overcoat for optimization of long focal length microlens arrays in semiconductor color imagers Yu-Kung Hsiao, Bii-Juno Chang, Kuo-Liang Lu 2004-11-23
6759276 Material to improve CMOS image sensor yield during wafer sawing Hung-Jen Hsu, Yu-Kung Hsiao, Chih-Kung Chang 2004-07-06
6712260 Bump reflow method by inert gas plasma Wen-Chang Kuo, Chia-Fu Lin, Szu-Yao Wang, Cheng-Yu Chu 2004-03-30
6686292 Plasma etch method for forming uniform linewidth residue free patterned composite silicon containing dielectric layer/silicon stack layer Szu-Hung Yang 2004-02-03
6660641 Method for forming crack resistant planarizing layer within microelectronic fabrication Chin-Chen Kuo, Yu-Kung Hsiao, Chih-Kung Chang, Fu-Tien Wong, Chung-Sheng Hsiung 2003-12-09
6638688 Selective electroplating method employing annular edge ring cathode electrode contact Kai-Ming Ching, Hao-Wei Chang, Chun-Hong Chang, Yen-Ming Chen 2003-10-28
6623912 Method to form the ring shape contact to cathode on wafer edge for electroplating in the bump process when using the negative type dry film photoresist Kai-Ming Ching, Yu-Kung Hsiao, Kuo-Liang Lu 2003-09-23
6586322 Method of making a bump on a substrate using multiple photoresist layers Chih-Cheng Chiu, Kuo-Liang Lu 2003-07-01
6582988 Method for forming micro lens structures Yu-Kung Hsiao, Bii-Junq Chang 2003-06-24
6495813 Multi-microlens design for semiconductor imaging devices to increase light collection efficiency in the color filter process Yang-Tung Fan, Bii-Cheng Chang, Kuo-Liang Lu 2002-12-17