Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7838386 | Method and system for patterning alignment marks on a transparent substrate | Ruei-Hung Jang, Ya-Wen Lee, Sheng-Liang Pan, Chin-Hsiang Lin, Tsai-Sheng Gau | 2010-11-23 |
| 7611960 | Method and system for wafer backside alignment | Sheng-Chieh Liu, Chia-Hung Kao, Sheng-Liang Pan, Yuan-Bang Lee | 2009-11-03 |
| 7494830 | Method and device for wafer backside alignment overlay accuracy | Sheng-Chieh Liu, Ya-Wen Lee, Jeffery Chu, Hsueh-Liang Chou, Chia-Hung Kao | 2009-02-24 |
| 7450296 | Method and system for patterning alignment marks on a transparent substrate | Ruei-Hung Jang, Ya-Wen Lee, Sheng-Liang Pan, Chin-Hsiang Lin, Tsai-Sheng Gau | 2008-11-11 |
| 7294279 | Method for releasing a micromechanical structure | Fei-Yun Chen, Shih-Shiung Chen | 2007-11-13 |
| 7205176 | Surface MEMS mirrors with oxide spacers | Fei-Yuh Chen, Wei-Ya Wang, Yuh-Hwa Chang | 2007-04-17 |
| 7183171 | Pyramid-shaped capacitor structure | Kun-Ming Huang, YJ Wang, Ying-De Chen, Eugene Chu, Fu-Hsin Chen | 2007-02-27 |