Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7611960 | Method and system for wafer backside alignment | Chia-Hung Kao, Tzu-Yang Wu, Sheng-Liang Pan, Yuan-Bang Lee | 2009-11-03 |
| 7494830 | Method and device for wafer backside alignment overlay accuracy | Tzu-Yang Wu, Ya-Wen Lee, Jeffery Chu, Hsueh-Liang Chou, Chia-Hung Kao | 2009-02-24 |