Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7494830 | Method and device for wafer backside alignment overlay accuracy | Sheng-Chieh Liu, Tzu-Yang Wu, Ya-Wen Lee, Hsueh-Liang Chou, Chia-Hung Kao | 2009-02-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7494830 | Method and device for wafer backside alignment overlay accuracy | Sheng-Chieh Liu, Tzu-Yang Wu, Ya-Wen Lee, Hsueh-Liang Chou, Chia-Hung Kao | 2009-02-24 |