SP

Sheng-Liang Pan

TSMC: 63 patents #490 of 12,232Top 5%
Overall (All Time): #35,146 of 4,157,543Top 1%
63
Patents All Time

Issued Patents All Time

Showing 51–63 of 63 patents

Patent #TitleCo-InventorsDate
6468704 Method for improved photomask alignment after epitaxial process through 90° orientation change Chi-Hung Liao, Yih-Ann Lin, Cheng-Yu Chu, Kuo-Liang Lu, Yu-Hsi Wang 2002-10-22
6417022 Method for making long focal length micro-lens for color filters Yu-Kung Hsiao, Bi-Cheng Chang, Kuo-Liang Lu 2002-07-09
6395576 High efficiency color filter process to improve color balance in semiconductor array imaging devices Chih-Kung Chang, Yu-Kung Hsiao, Bii-Junq Chang 2002-05-28
6360756 Wafer rinse tank for metal etching and method for using Chie-Chi Chen, Tzu-Yang Chung, Szu-Yao Wang 2002-03-26
6281140 Method of reducing the roughness of a gate insulator layer after exposure of the gate insulator layer to a threshold voltage implantation procedure Chie-Chi Chen 2001-08-28
6274917 High efficiency color filter process for semiconductor array imaging devices Yang-Tung Fan, Bii-Cheng Chang, Kuo-Liang Lu 2001-08-14
6171885 High efficiency color filter process for semiconductor array imaging devices Yang-Tung Fan, Bii-Cheng Chang, Kuo-Liang Lu 2001-01-09
6143579 Efficient method for monitoring gate oxide damage related to plasma etch chamber processing history Chia-Der Chang, Chi-Hung Liao, Dean E. Lin 2000-11-07
6107202 Passivation photoresist stripping method to eliminate photoresist extrusion after alloy Chih-Kang Chiu 2000-08-22
6103633 Method for cleaning metal precipitates in semiconductor processes Yun-Hung Shen 2000-08-15
5880019 Insitu contact descum for self-aligned contact process Chin-Chuan Hsieh, Chi-Hsin Lo 1999-03-09
5776832 Anti-corrosion etch process for etching metal interconnections extending over and within contact openings Chia-Dar Hsieh, Yun-Hung Shen, Jen Song Liu 1998-07-07
5556806 Spin-on-glass nonetchback planarization process using oxygen plasma treatment Hsien-Wen Chang, Chien-Fong Chen 1996-09-17