Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6232619 | Dosage micro uniformity measurement in ion implantation | Yao-Yu Lee | 2001-05-15 |
| 6107108 | Dosage micro uniformity measurement in ion implantation | Yao-Yu Lee | 2000-08-22 |
| 5704986 | Semiconductor substrate dry cleaning method | Chia-Chun Cheng, Chi Chang, Kuo-Sheng Chuang | 1998-01-06 |
| 5556806 | Spin-on-glass nonetchback planarization process using oxygen plasma treatment | Sheng-Liang Pan, Hsien-Wen Chang | 1996-09-17 |