Issued Patents All Time
Showing 51–72 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7060606 | Method and apparatus for chemical mechanical polishing of semiconductor substrates | Stan Tsai, Liang-Yuh Chen, Lizhong Sun, Shijian Li, Feng Q. Liu +2 more | 2006-06-13 |
| 6979248 | Conductive polishing article for electrochemical mechanical polishing | Yongqi Hu, Yan Wang, Alain Duboust, Feng Q. Liu, Rashid Mavliev +2 more | 2005-12-27 |
| 6977036 | Method and apparatus for substrate polishing | Ralph Wadensweiler, Alain Duboust, Liang-Yuh Chen, Manoocher Birang, Paul D. Butterfield | 2005-12-20 |
| 6929774 | Method and apparatus for heating and cooling substrates | Ho Seon Shin, Robin Cheung, Igor Kogan | 2005-08-16 |
| 6896776 | Method and apparatus for electro-chemical processing | Wei-Yung Hsu, Liang-Yuh Chen, Daniel Carl, Sasson Somekh | 2005-05-24 |
| 6897146 | System architecture of semiconductor manufacturing equipment | Ho Seon Shin | 2005-05-24 |
| 6893548 | Method of conditioning electrochemical baths in plating technology | Robin Cheung, Daniel Carl, Liang-Yuh Chen, Yezdi Dordi, Paul Smith +2 more | 2005-05-17 |
| 6884724 | Method for dishing reduction and feature passivation in polishing processes | Wei-Yung Hsu, Liang-Yuh Chen, Daniel Carl | 2005-04-26 |
| 6841057 | Method and apparatus for substrate polishing | Ralph Wadensweiler, Alain Duboust, Liang-Yuh Chen, Manoocher Birang, Paul D. Butterfield | 2005-01-11 |
| 6821881 | Method for chemical mechanical polishing of semiconductor substrates | Stan Tsai, Liang-Yuh Chen, Lizhong Sun, Shijian Li, Feng Q. Liu +2 more | 2004-11-23 |
| 6811680 | Planarization of substrates using electrochemical mechanical polishing | Liang-Yuh Chen, Wei-Yung Hsu, Alain Duboust, Daniel Carl | 2004-11-02 |
| 6658763 | Method for heating and cooling substrates | Ho Seon Shin, Robin Cheung, Igor Kogan | 2003-12-09 |
| 6635157 | Electro-chemical deposition system | Yezdi Dordi, Donald Olgado, Peter Hey, Mark Denome, Michael Sugarman +10 more | 2003-10-21 |
| 6599368 | System architecture of semiconductor manufacturing equipment | Ho Seon Shin | 2003-07-29 |
| 6477787 | Method and apparatus for heating and cooling substrates | Ho Seon Shin, Robin Cheung, Igor Kogan | 2002-11-12 |
| 6357143 | Method and apparatus for heating and cooling substrates | Ho Seon Shin, Robin Cheung, Igor Kogan | 2002-03-19 |
| 6276072 | Method and apparatus for heating and cooling substrates | Ho Seon Shin, Robin Cheung, Igor Kogan | 2001-08-21 |
| 6258223 | In-situ electroless copper seed layer enhancement in an electroplating system | Robin Cheung, Daniel Carl, Yezdi Dordi, Peter Hey, Liang-Yuh Chen +2 more | 2001-07-10 |
| 6258220 | Electro-chemical deposition system | Yezdi Dordi, Donald Olgado, Peter Hey, Mark Denome, Michael Sugarman +10 more | 2001-07-10 |
| 5083085 | Compact shielded gradient coil system | — | 1992-01-21 |
| 5012217 | Integrated active shielded magnet system | Alex Palkovich, John M. Bird | 1991-04-30 |
| 5003266 | Passively improving magnetic field homogeneity | Alex Palkovich | 1991-03-26 |