Issued Patents All Time
Showing 26–50 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8123963 | Method for producing a semiconductor component and a semiconductor component produced according to the method | Heribert Weber, Hans Artmann, Frank Schaefer | 2012-02-28 |
| 7918136 | Micromechanical sensor element | Joerg Muchow, Simon Armbruster, Christoph Schelling | 2011-04-05 |
| 7872487 | Semiconductor wafer having a multitude of sensor elements and method for measuring sensor elements on a semiconductor wafer | Holger Ross, Roland Guenschel, Harald Guenschel | 2011-01-18 |
| 7858424 | Method for manufacturing a sensor array including a monolithically integrated circuit | Simon Armbruster | 2010-12-28 |
| 7843025 | Micromechanical semiconductor sensor | Frank Schaefer, Simon Armbruster, Gerhard Lammel, Christoph Schelling, Joerg Brasas | 2010-11-30 |
| 7833405 | Micromechanical component and corresponding production method | Heribert Weber, Hans Artmann, Frank Schaeffer | 2010-11-16 |
| 7755152 | Semiconductor component configured as a diaphragm sensor | Frank Schaefer, Simon Armbruster, Gerhard Lammel, Christoph Schelling, Joerg Brasas | 2010-07-13 |
| 7740459 | Micropump having a pump diaphragm and a polysilicon layer | Matthias Fuertsch, Stefan Finkbeiner, Stefan Pinter, Frank Fischer, Heiko Stahl +1 more | 2010-06-22 |
| 7679154 | Method for manufacturing a semiconductor component and a semiconductor component, in particular a diaphragm sensor | Heribert Weber, Hans Artmann, Thorsten Pannek, Frank Schäfer | 2010-03-16 |
| 7647832 | Micromechanical device and method for producing a micromechanical device | Joerg Muchow, Markus Lang, Regina Grote, Simon Armbruster, Gerhard Lammel +2 more | 2010-01-19 |
| 7585662 | Container for an analysis chip | Kurt Weiblen | 2009-09-08 |
| 7572660 | Electrical through-plating of semiconductor chips | Stefan Finkbeiner, Christoph Schelling, Julian Gonska | 2009-08-11 |
| 7572661 | Method for manufacturing a micromechanical sensor element | Stefan Finkbeiner, Matthias Illing, Frank Schaefer, Simon Armbruster, Gerhard Lammel +2 more | 2009-08-11 |
| 7569412 | Method for manufacturing a diaphragm sensor | Frank Schaefer, Simon Armbruster, Gerhard Lammel, Christoph Schelling, Joerg Brasas | 2009-08-04 |
| 7563634 | Method for mounting semiconductor chips, and corresponding semiconductor chip system | — | 2009-07-21 |
| 7555956 | Micromechanical device having two sensor patterns | Christoph Schelling | 2009-07-07 |
| 7494839 | Method for manufacturing a membrane sensor | Frank Schaefer, Simon Armbruster, Gerhard Lammel, Christoph Schelling, Joerg Brasas | 2009-02-24 |
| 7493819 | Micromechanical pressure sensor system | Roland Guenschel | 2009-02-24 |
| 7479234 | Method for producing cavities having optically transparent wall | Heribert Weber, Frank Schaefer | 2009-01-20 |
| 7479232 | Method for producing a semiconductor component and a semiconductor component produced according to the method | Heribert Weber, Hans Artmann, Frank Schaefer | 2009-01-20 |
| 7419581 | Method for producing optically transparent regions in a silicon substrate | Heribert Weber, Hans Artmann, Frank Schaefer | 2008-09-02 |
| 7404332 | Micromechanical component and method | Gerhard Lammel, Simon Armbruster, Frank Schaefer | 2008-07-29 |
| 7368313 | Method of making a differential pressure sensor | Gerhard Lammel | 2008-05-06 |
| 7354786 | Sensor element with trenched cavity | Stefan Finkbeiner, Matthias Illing, Frank Schaefer, Simon Armbruster, Gerhard Lammel +2 more | 2008-04-08 |
| 7343806 | Pressure sensor featuring pressure loading of the fastening element | Joerg Muchow, Heribert Weber, Frank Schaefer | 2008-03-18 |