Issued Patents All Time
Showing 51–73 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7306966 | Method for producing a semiconductor component and a semiconductor component, especially a membrane sensor | Heribert Weber, Hans Artmann, Thorsten Pannek, Frank Schäfer | 2007-12-11 |
| 7300854 | Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method | Heribert Weber, Frank Schaefer | 2007-11-27 |
| 7252008 | Micromechanical piezoresistive pressure sensor device | Joerg Muchow | 2007-08-07 |
| 7213465 | Micromechanical sensor | Frank Schaefer, Christoph Schelling | 2007-05-08 |
| 7193290 | Semiconductor component and a method for producing the same | Heribert Weber, Frank Schaefer | 2007-03-20 |
| 7160750 | Method of producing a semiconductor sensor component | Heribert Weber, Frank Schaefer | 2007-01-09 |
| 7093493 | Pressure sensor having a silicon chip on a steel diaphragm | Masoud Habibi, Gilbert Moersch, Roland Guenschel, Jan Gebauer | 2006-08-22 |
| 7073400 | Sensor for measuring pressure in a sealed volume | Stefan Pinter, Helmut Grutzeck | 2006-07-11 |
| 7055392 | Micromechanical pressure sensor | Joerg Muchow, Roland Guenschel | 2006-06-06 |
| 7045382 | Method for producing micromechanic sensors and sensors produced by said method | Heribert Weber, Hans Artmann, Frank Schaefer | 2006-05-16 |
| 7037438 | Method for production of a semiconductor component and a semiconductor component produced by said method | Heribert Weber, Hans Artmann, Frank Schaefer | 2006-05-02 |
| 7026224 | Method for dicing semiconductor chips and corresponding semiconductor chip system | Julian Gonska | 2006-04-11 |
| 6972447 | Semiconductor component having a first earlier structure differing from a second earlier structure | Hans Artmann, Frank Schaeffer | 2005-12-06 |
| 6906392 | Micromechanical component | Heribert Weber, Michael Bauer, Hans Artmann, Thorsten Pannek, Frank Schaefer +1 more | 2005-06-14 |
| 6840111 | Micromechanical component and pressure sensor having a component of this type | Heribert Weber, Frank Schaefer | 2005-01-11 |
| 6832523 | Micromechanical component and manufacturing method | Heribert Weber, Frank Schaefer | 2004-12-21 |
| 6803637 | Micromechanical component with different doping types so that one type is anodized into porous silicon | Heribert Weber, Hans Artmann, Frank Schaefer | 2004-10-12 |
| 6649989 | Micromechanical diaphragm | Frank Schaefer | 2003-11-18 |
| 6511913 | Method for manufacturing a membrane | Stefan Finkbeiner | 2003-01-28 |
| 6395574 | Micromechanical component and appropriate manufacturing method | Frank Schaefer, Heinz-Georg Vossenberg | 2002-05-28 |
| 6062088 | Pressure sensor | Kurt Ingrisch, Kurt Weiblen, Botho Ziegenbein, Hans-Peter Trah, Andreas Duell +2 more | 2000-05-16 |
| 5792957 | Capacitive pressure sensors with high linearity by optimizing electrode boundaries | Ernst Luder, Traugott Kallfass, Joerg Schaepperle | 1998-08-11 |
| 5445031 | Pressure-measuring arrangement with high linearity | — | 1995-08-29 |