Issued Patents All Time
Showing 51–75 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9698025 | Directed self-assembly material growth mask for forming vertical nanowires | Steven Bentley, Richard A. Farrell, Ajey Poovannummoottil Jacob | 2017-07-04 |
| 9678012 | Integrated device with external light source for probing detecting and analyzing molecules | Jonathan M. Rothberg, Ali Kabiri, Jason W. Sickler, Brett J. Gyarfas, Jeremy Lackey +4 more | 2017-06-13 |
| 9651862 | Drop pattern generation for imprint lithography with directionally-patterned templates | Edward Brian Fletcher, Se-Hyuk Im, Niyaz Khusnatdinov, Yeshwanth Srinivasan, Weijun Liu +1 more | 2017-05-16 |
| 9613807 | Methods for fabricating integrated circuits using directed self-assembly chemoepitaxy | Ji Xu, Richard A. Farrell | 2017-04-04 |
| 9508562 | Sidewall image templates for directed self-assembly materials | Ji Xu, Richard A. Farrell, Moshe E. Preil | 2016-11-29 |
| 9478506 | Multilayer pattern transfer for chemical guides | Richard A. Farrell, Sudharshanan Raghunathan | 2016-10-25 |
| 9455154 | Methods for fabricating guide patterns and methods for fabricating integrated circuits using such guide patterns | Richard A. Farrell | 2016-09-27 |
| 9275896 | Methods for fabricating integrated circuits using directed self-assembly | Deniz E. Civay, Ji Xu, Guillaume Bouche, Richard A. Farrell | 2016-03-01 |
| 9196765 | Nanostructured solar cell | Shuqiang Yang, Michael Nevin Miller, Mohamed M. Hilali, Fen Wan, Liang-Tang Wang +2 more | 2015-11-24 |
| 9122148 | Master template replication | Michael Nevin Miller, Cynthia B. Brooks, Laura A. Brown | 2015-09-01 |
| 9070803 | Nanostructured solar cell | Shuqiang Yang, Michael Nevin Miller, Mohamed M. Hilali, Fen Wan, Liang-Tang Wang +2 more | 2015-06-30 |
| 8980751 | Methods and systems of material removal and pattern transfer | Michael Nevin Miller, Byung-Jin Choi, Douglas J. Resnick, Sidlgata V. Sreenivasan, Frank Y. Xu +1 more | 2015-03-17 |
| 8968620 | Safe separation for nano imprinting | Se-Hyuk Im, Mahadevan GanapathiSubramanian, Edward Brian Fletcher, Niyaz Khusnatdinov, Mario Johannes Meissl +4 more | 2015-03-03 |
| 8969207 | Methods of forming a masking layer for patterning underlying structures | Jeremy A. Wahl, Richard A. Farrell, Chanro Park | 2015-03-03 |
| 8956808 | Asymmetric templates for forming non-periodic patterns using directed self-assembly materials | Richad A. Farrell, Ji Xu, Jason R. Cantone, Moshe E. Preil | 2015-02-17 |
| 8906802 | Methods of forming trench/via features in an underlying structure using a process that includes a masking layer formed by a directed self-assembly process | Jeremy A. Wahl, Richard A. Farrell, Chanro Park | 2014-12-09 |
| 8889343 | Optimizing lithographic processes using laser annealing techniques | Moshe E. Preil, Richard A. Farrell, Ji Xu, Thomas I. Wallow | 2014-11-18 |
| 8877073 | Imprint lithography template | Douglas J. Resnick, Sidlgata V. Sreenivasan, Frank Y. Xu | 2014-11-04 |
| 8853101 | Methods for fabricating integrated circuits including formation of chemical guide patterns for directed self-assembly lithography | Richard A. Farrell, Xu Ji | 2014-10-07 |
| 8790522 | Chemical and physical templates for forming patterns using directed self-assembly materials | Richad A. Farrell, Ji Xu, Jason R. Cantone, Moshe E. Preil | 2014-07-29 |
| 8652393 | Strain and kinetics control during separation phase of imprint process | Niyaz Khusnatdinov, Frank Y. Xu, Mario Johannes Meissl, Michael Nevin Miller, Ecron D. Thompson +3 more | 2014-02-18 |
| 8512585 | Template pillar formation | Gary F. Doyle, Michael Nevin Miller, Douglas J. Resnick, Dwayne L. LaBrake | 2013-08-20 |
| 8394203 | In-situ cleaning of an imprint lithography tool | Ian McMackin, Byung-Jin Choi, Douglas J. Resnick | 2013-03-12 |
| 8012395 | Template having alignment marks formed of contrast material | Kosta S. Selinidis, Byung-Jin Choi, Ecron D. Thompson, Ian McMackin | 2011-09-06 |
| 7985530 | Etch-enhanced technique for lift-off patterning | Douglas J. Resnick | 2011-07-26 |