HF

Haiying Fu

NS Novellus Systems: 29 patents #15 of 780Top 2%
Lam Research: 2 patents #1,015 of 2,128Top 50%
Overall (All Time): #96,925 of 4,157,543Top 3%
35
Patents All Time

Issued Patents All Time

Showing 26–35 of 35 patents

Patent #TitleCo-InventorsDate
7341761 Methods for producing low-k CDO films Qingguo Wu, Xingyuan Tang 2008-03-11
7326444 Methods for improving integration performance of low stress CDO films Qingguo Wu, Dong Niu, Honghong Wang 2008-02-05
7282438 Low-k SiC copper diffusion barrier films Yongsik Yu, Karen Billington, Xingyuan Tang, Michael Carris, William Crew 2007-10-16
7253125 Method to improve mechanical strength of low-k dielectric film using modulated UV exposure Ananda K. Bandyopadhyay, Seon-Mee Cho, Easwar Srinivasan, David Mordo 2007-08-07
7241704 Methods for producing low stress porous low-k dielectric materials using precursors with organic functional groups Qingguo Wu, David Craig Smith, David Mordo 2007-07-10
7208389 Method of porogen removal from porous low-k films using UV radiation Adrianne K. Tipton, Brian Lu, Patrick A. Van Cleemput, Michelle T. Schulberg, Qingguo Wu +1 more 2007-04-24
7094713 Methods for improving the cracking resistance of low-k dielectric materials Dong Niu, Brian Lu, Feng Wang 2006-08-22
6855645 Silicon carbide having low dielectric constant Xingyuan Tang 2005-02-15
6777349 Hermetic silicon carbide Ka Shun Wong, Xingyuan Tang, Judy H. Huang, Bart J. van Schravendijk 2004-08-17
6764952 Systems and methods to retard copper diffusion and improve film adhesion for a dielectric barrier on copper Jengyi Yu, Ka Shun Wong, Sanjeev Kumar Jain, Somnath Nag, Atul Gupta +1 more 2004-07-20