Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8715788 | Method to improve mechanical strength of low-K dielectric film using modulated UV exposure | Seon-Mee Cho, Haiying Fu, Easwar Srinivasan, David Mordo | 2014-05-06 |
| 8043667 | Method to improve mechanical strength of low-K dielectric film using modulated UV exposure | Seon-Mee Cho, Haiying Fu, Easwar Srinivasan, David Mordo | 2011-10-25 |
| 7781351 | Methods for producing low-k carbon doped oxide films with low residual stress | Qingguo Wu, Haiying Fu, Dong Niu, David Mordo | 2010-08-24 |
| 7611757 | Method to improve mechanical strength of low-K dielectric film using modulated UV exposure | Seon-Mee Cho, Haiying Fu, Easwar Srinivasan, David Mordo | 2009-11-03 |
| 7253125 | Method to improve mechanical strength of low-k dielectric film using modulated UV exposure | Seon-Mee Cho, Haiying Fu, Easwar Srinivasan, David Mordo | 2007-08-07 |