Issued Patents All Time
Showing 26–50 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7929110 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Douglas C. Watson | 2011-04-19 |
| 7889207 | Image apparatus with image noise compensation | Li Hong, Maki Suzuki, Mark Takita | 2011-02-15 |
| 7869000 | Stage assembly with lightweight fine stage and low transmissibility | Yoichi Arai, Andrew J. Hazelton, Michael Binnard, Douglas C. Watson, Kirk Lok | 2011-01-11 |
| 7720371 | Depth layer extraction and image synthesis from focus varied multiple images | Li Hong, Mark Takita | 2010-05-18 |
| RE41232 | Wafer positioner with planar motor and mag-lev fine stage | Andrew J. Hazelton, Akimitsu Ebihara | 2010-04-20 |
| 7688421 | Fluid pressure compensation for immersion lithography lens | Douglas C. Watson | 2010-03-30 |
| 7612892 | Imaging optical system configured with through the lens optics for producing control information | Daniel Gene Smith, David M. Williamson | 2009-11-03 |
| 7572019 | Adaptive-optics actuator arrays and methods for using such arrays | — | 2009-08-11 |
| 7570431 | Optical arrangement of autofocus elements for use with immersion lithography | — | 2009-08-04 |
| 7466396 | Lithography apparatus and method utilizing pendulum interferometer system | Michael Binnard, Douglas C. Watson, Hiroto Horikawa, Yoshifumi Nakakoji, Hideaki Sakamoto | 2008-12-16 |
| 7443482 | Liquid jet and recovery system for immersion lithography | Andrew J. Hazelton, Douglas C. Watson | 2008-10-28 |
| 7414794 | Optical arrangement of autofocus elements for use with immersion lithography | — | 2008-08-19 |
| 7397532 | Run-off path to collect liquid for an immersion lithography apparatus | — | 2008-07-08 |
| 7345742 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Douglas C. Watson | 2008-03-18 |
| 7333179 | Moving mechanism with high bandwidth response and low force transmissibility | Bausan Yuan, Martin E. Lee | 2008-02-19 |
| 7251017 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Douglas C. Watson | 2007-07-31 |
| 7172493 | Fine force actuator assembly for chemical mechanical polishing apparatuses | Douglas C. Watson, Pai-Hsueh Yang, Bausan Yuan | 2007-02-06 |
| 7125128 | Adaptive-optics actuator arrays and methods for using such arrays | — | 2006-10-24 |
| 7072024 | Lithographic projection method and apparatus | — | 2006-07-04 |
| 6980279 | Interferometer system for measuring a height of wafer stage | — | 2005-12-27 |
| 6963821 | Stage counter mass system | Michael Binnard, Toshio Ueta, Bausan Yuan | 2005-11-08 |
| 6880942 | Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system | Andrew J. Hazelton, Alton H. Phillips, Douglas C. Watson | 2005-04-19 |
| 6815695 | Simplified reticle stage removal system for an electron beam system | Douglas C. Watson | 2004-11-09 |
| 6781138 | Positioning stage with stationary actuators | Michael Kovalerchik | 2004-08-24 |
| 6765650 | Vacuum compatible air bearing stage | — | 2004-07-20 |