Issued Patents All Time
Showing 76–81 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4704033 | Multiple wavelength linear zone plate alignment apparatus and method | Bernard Fay | 1987-11-03 |
| 4648106 | Gas control for X-ray lithographic system | — | 1987-03-03 |
| 4549843 | Mask loading apparatus, method and cassette | Peter Jagusch | 1985-10-29 |
| 4516253 | Lithography system | — | 1985-05-07 |
| 4514858 | Lithography system | — | 1985-04-30 |
| 4376580 | Projection aligner with bending mirror | David W. Volmer | 1983-03-15 |