Issued Patents All Time
Showing 51–75 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6753534 | Positioning stage with stationary and movable magnet tracks | Michael Kovalerchik | 2004-06-22 |
| 6735867 | Method of making a static pressure air bearing | Takuma Tsuda, Shinji Shinohara, Shinobu Tokushima, Yukiharu Okubo, Toshimasa Shimoda +1 more | 2004-05-18 |
| 6717159 | Low distortion kinematic reticle support | — | 2004-04-06 |
| 6674512 | Interferometer system for a semiconductor exposure system | David Stumbo, Fuyuhiko Inoue | 2004-01-06 |
| 6653639 | Chuck for mounting reticle to a reticle stage | — | 2003-11-25 |
| 6597435 | Reticle stage with reaction force cancellation | Alex Ka Tim Poon | 2003-07-22 |
| 6562528 | Method for determining and calibrating image plane tilt and substrate plane tilt in photolithography | — | 2003-05-13 |
| 6525802 | Kinematic mounted reference mirror with provision for stable mounting of alignment optics | — | 2003-02-25 |
| 6515381 | Cantilever stage | Michael Kovalerchik | 2003-02-04 |
| 6499880 | Static pressure air bearing | Takuma Tsuda, Shinji Shinohara, Shinobu Tokushima, Yukiharu Okubo, Toshimasa Shimoda +1 more | 2002-12-31 |
| 6478136 | Method and apparatus for automatically transporting and precisely positioning work pieces at processing stations | — | 2002-11-12 |
| 6467960 | Air bearing linear guide for use in a vacuum | Douglas C. Watson | 2002-10-22 |
| 6437463 | Wafer positioner with planar motor and mag-lev fine stage | Andrew J. Hazelton, Akimitsu Ebihara | 2002-08-20 |
| 6363809 | Precision scanning apparatus and method with fixed and movable guide members | Zahirudeen Premji, Uday Nayak, Akimitsu Ebihara | 2002-04-02 |
| 6355993 | Linear motor having polygonal shaped coil units | Andrew J. Hazelton | 2002-03-12 |
| 6278203 | Cooling structure for a linear motor | Andrew J. Hazelton, Ken G. Wasson | 2001-08-21 |
| 6239924 | Kinematic lens mounting with distributed support and radial flexure | Douglas C. Watson | 2001-05-29 |
| 6147421 | Platform positionable in at least three degrees of freedom by interaction with coils | Mark Takita, Andrew J. Hazelton | 2000-11-14 |
| 6140734 | Armature with regular windings and having a high conductor density | Andrew J. Hazelton | 2000-10-31 |
| 6134981 | Precision scanning apparatus and method with fixed and movable guide members | Zahirudeen Premji, Uday Nayak, Akimitsu Ebihara | 2000-10-24 |
| 5996437 | Precision motion stage with single guide beam and follower stage | Zahirudeen Premji, Uday Nayak, Akimitsu Ebihara | 1999-12-07 |
| 5998889 | Electro-magnetic motor cooling system | — | 1999-12-07 |
| 5760564 | Dual guide beam stage mechanism with yaw control | — | 1998-06-02 |
| 5623853 | Precision motion stage with single guide beam and follower stage | Zahirudeen Premji, Uday Nayak, Akimitsu Ebihara | 1997-04-29 |
| 4723086 | Coarse and fine motion positioning mechanism | Vladimir E. Leibovich | 1988-02-02 |