Issued Patents All Time
Showing 26–50 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10935889 | Extreme ultra-violet sensitivity reduction using shrink and growth method | Lior Huli | 2021-03-02 |
| 10930764 | Extension region for a semiconductor device | Kandabara Tapily, Jeffrey Smith, Anton J. deVilliers | 2021-02-23 |
| 10895671 | Diffraction grating with a variable refractive index using ion implantation | Giuseppe Calafiore, Austin Lane, Matthew E. Colburn | 2021-01-19 |
| 10845526 | Outward coupling suppression in waveguide display | Hee Yoon Lee, Ningfeng Huang, Pasi Saarikko, Yu Shi, Giuseppe Calafiore | 2020-11-24 |
| 10838121 | Manufacturing three-dimensional diffraction gratings by selective deposition or selective etching | Giuseppe Calafiore, Matthew E. Colburn, Austin Lane, Matthieu Charles Raoul Leibovici | 2020-11-17 |
| 10732351 | Gratings with variable depths formed using planarization for waveguide displays | Matthew E. Colburn, Giuseppe Calafiore, Matthieu Charles Raoul Leibovici | 2020-08-04 |
| 10712481 | Fabricating of diffraction grating by ion beam etching | Giuseppe Calafiore, Matthew E. Colburn, Austin Lane, Matthieu Charles Raoul Leibovici | 2020-07-14 |
| 10684407 | Reactivity enhancement in ion beam etcher | — | 2020-06-16 |
| 10649119 | Duty cycle, depth, and surface energy control in nano fabrication | Matthieu Charles Raoul Leibovici | 2020-05-12 |
| 10649141 | Gratings with variable etch heights for waveguide displays | Matthew E. Colburn, Giuseppe Calafiore, Matthieu Charles Raoul Leibovici | 2020-05-12 |
| 10580660 | Gas phase etching system and method | Subhadeep Kal, Angelique Raley, Aelan Mosden, Scott Lefevre | 2020-03-03 |
| 10580650 | Method for bottom-up formation of a film in a recessed feature | David L. O'Meara, Kandabara Tapily | 2020-03-03 |
| 10529830 | Extension region for a semiconductor device | Kandabara Tapily, Jeffrey Smith, Anton J. deVilliers | 2020-01-07 |
| 10502958 | H2-assisted slanted etching of high refractive index material | — | 2019-12-10 |
| 10366890 | Method for patterning a substrate using a layer with multiple materials | Anton J. deVilliers | 2019-07-30 |
| 10354873 | Organic mandrel protection process | Akiteru Ko, Angelique Raley, Sophie Thibaut, Satoru Nakamura | 2019-07-16 |
| 10319637 | Method for fully self-aligned via formation using a directed self assembly (DSA) process | Elliott Franke, Richard A. Farrell | 2019-06-11 |
| 10274651 | Manufacturing three-dimensional diffraction gratings by selective deposition or selective etching | Giuseppe Calafiore, Matthew E. Colburn, Austin Lane, Matthieu Charles Raoul Leibovici | 2019-04-30 |
| 10256110 | Self-aligned patterning process utilizing self-aligned blocking and spacer self-healing | — | 2019-04-09 |
| 10256140 | Method of reducing overlay error in via to grid patterning | — | 2019-04-09 |
| 10236186 | Methods for dry hard mask removal on a microelectronic substrate | — | 2019-03-19 |
| 10141183 | Methods of spin-on deposition of metal oxides | Lior Huli, Jeffrey Smith, Richard A. Farrell | 2018-11-27 |
| 10083842 | Methods of sub-resolution substrate patterning | Anton J. deVilliers, Jeffrey Smith | 2018-09-25 |
| 10049892 | Method for processing photoresist materials and structures | Eric Chih-Fang Liu, Elliott Franke | 2018-08-14 |
| 9997598 | Three-dimensional semiconductor device and method of fabrication | Jeffrey Smith, Anton J. deVilliers, Subhadeep Kal, Kandabara Tapily | 2018-06-12 |