Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12308250 | Pre-etch treatment for metal etch | Angelique Raley | 2025-05-20 |
| 11626271 | Surface fluorination remediation for aluminium oxide electrostatic chucks | Akiteru Ko | 2023-04-11 |
| 11538691 | Gas phase etch with controllable etch selectivity of Si-containing arc or silicon oxynitride to different films or masks | Subhadeep Kal, Nihar Mohanty, Angelique Raley, Aelan Mosden | 2022-12-27 |
| 11380554 | Gas phase etching system and method | Subhadeep Kal, Nihar Mohanty, Angelique Raley, Aelan Mosden | 2022-07-05 |
| 10971372 | Gas phase etch with controllable etch selectivity of Si-containing arc or silicon oxynitride to different films or masks | Subhadeep Kal, Nihar Mohanty, Angelique Raley, Aelan Mosden | 2021-04-06 |
| 10580660 | Gas phase etching system and method | Subhadeep Kal, Nihar Mohanty, Angelique Raley, Aelan Mosden | 2020-03-03 |
| 9054050 | Method for deep silicon etching using gas pulsing | Alok Ranjan | 2015-06-09 |
| 8962067 | Real time process control of the polymer dispersion index | Bruce Altemus | 2015-02-24 |