Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991133 | Method for etch-based planarization of a substrate | Cheryl Pereira, Lior Huli | 2018-06-05 |
| 9812325 | Method for modifying spacer profile | Akiteru Ko | 2017-11-07 |
| 9786503 | Method for increasing pattern density in self-aligned patterning schemes without using hard masks | Angelique Raley, Akiteru Ko | 2017-10-10 |
| 9748110 | Method and system for selective spacer etch for multi-patterning schemes | Subhadeep Kal, Angelique Raley, Aelan Mosden | 2017-08-29 |
| 9520270 | Direct current superposition curing for resist reflow temperature enhancement | Akiteru Ko, Chi-Chun Liu | 2016-12-13 |
| 9478435 | Method for directed self-assembly and pattern curing | — | 2016-10-25 |
| 9272911 | Production of graphene nanoribbons with controlled dimensions and crystallographic orientation | Vikas Berry, David Moore | 2016-03-01 |