Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7749893 | Methods and systems for low interfacial oxide contact between barrier and copper metallization | Fritz Redeker, John M. Boyd, Yezdi Dordi, Shijian Li | 2010-07-06 |
| 7691278 | Apparatus for the removal of a fluorinated polymer from a substrate and methods therefor | John M. Boyd, Andras Kuthi, Andrew D. Bailey, III | 2010-04-06 |
| 7662253 | Apparatus for the removal of a metal oxide from a substrate and methods therefor | William Thie, Yezdi Dordi, Andrew D. Bailey, III | 2010-02-16 |
| 7651585 | Apparatus for the removal of an edge polymer from a substrate and methods therefor | Yunsang Kim, Jason A. Ryder, Andrew D. Bailey, III | 2010-01-26 |
| 7615480 | Methods of post-contact back end of the line through-hole via integration | John M. Boyd, Fritz Redeker, Yezdi Dordi, Shijian Li | 2009-11-10 |
| 7615486 | Apparatus and method for integrated surface treatment and deposition for copper interconnect | Mikhail Korolik, Fritz Redeker, John M. Boyd, Yezdi Dordi | 2009-11-10 |
| 7540935 | Plasma oxidation and removal of oxidized material | Yunsang Kim, Andrew D. Bailey, III, Arthur M. Howald | 2009-06-02 |
| 7396565 | Multiple precursor cyclical deposition system | Michael Yang, Hui Zhang, Hongbin Fang, Ming Xi | 2008-07-08 |
| 6958296 | CVD TiSiN barrier for copper integration | Ling Chen, Christophe Marcadal | 2005-10-25 |
| 6846516 | Multiple precursor cyclical deposition system | Michael Yang, Hui Zhang, Hongbin Fang, Ming Xi | 2005-01-25 |
| 6827978 | Deposition of tungsten films | Hongbin Fang, Michael Yang | 2004-12-07 |
| 6809026 | Selective deposition of a barrier layer on a metal film | Michael Yang, Hui Zhang, Soonil Hong, Ming Xi | 2004-10-26 |
| 6596643 | CVD TiSiN barrier for copper integration | Ling Chen, Christophe Marcadal | 2003-07-22 |
| 6218301 | Deposition of tungsten films from W(CO)6 | Michael Yang, Ming Xi | 2001-04-17 |