Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6894491 | Method and apparatus for metrological process control implementing complementary sensors | Yehiel Gotkis, Rodney Kistler, Aleksander Owczarz, Nicolas Bright | 2005-05-17 |
| 6859765 | Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection | Yehiel Gotkis, Vladimir Katz, Rodney Kistler, Nicolas Bright | 2005-02-22 |
| 6821899 | System, method and apparatus for improved local dual-damascene planarization | Shrikant Lohokare, Andrew D. Bailey, III, Joel M. Cook | 2004-11-23 |
| 6808590 | Method and apparatus of arrayed sensors for metrological control | Yehiel Gotkis, Rodney Kistler, Aleksander Owczarz, Nicolas Bright | 2004-10-26 |
| 6759336 | Methods for reducing contamination of semiconductor substrates | Robert Chebi | 2004-07-06 |
| 6736720 | Apparatus and methods for controlling wafer temperature in chemical mechanical polishing | Nicolas Bright | 2004-05-18 |
| 6716303 | Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same | Tuqiang Ni, Wenli Collison, Lumin Li | 2004-04-06 |
| 6527911 | Configurable plasma volume etch chamber | Bi-Ming Yen, Tuqiang Ni, Lumin Li | 2003-03-04 |
| 6528427 | Methods for reducing contamination of semiconductor substrates | Robert Chebi | 2003-03-04 |
| 6341574 | Plasma processing systems | Andrew D. Bailey, III, Alan M. Schoepp, Mark Wilcoxson, Andras Kuthi | 2002-01-29 |
| 5160407 | Low pressure anisotropic etch process for tantalum silicide or titanium silicide layer formed over polysilicon layer deposited on silicon oxide layer on semiconductor wafer | Ian Latchford, Patrica Vasquez, Brigitte Petit | 1992-11-03 |