Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7716003 | Model-based measurement of semiconductor device features with feed forward use of data for dimensionality reduction | Daniel Wack, Andrei Veldman, Edward Ratner, John J. Hench | 2010-05-11 |
| 7663753 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more | 2010-02-16 |
| 7633070 | Substrate processing apparatus and method | Marek Zywno | 2009-12-15 |
| 7515253 | System for measuring a sample with a layer containing a periodic diffracting structure | Daniel Wack, Guoheng Zhao | 2009-04-07 |
| 7483133 | Multiple angle of incidence spectroscopic scatterometer system | Haiming Wang | 2009-01-27 |
| 7379183 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +6 more | 2008-05-27 |
| 7317531 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +10 more | 2008-01-08 |
| 7301634 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +7 more | 2007-11-27 |
| 7298481 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +4 more | 2007-11-20 |
| 7280230 | Parametric profiling using optical spectroscopic systems | Andrei V. Shchegrov, Anatoly Fabrikant, Mehrdad Nikoonahad, Ady Levy, Daniel Wack +2 more | 2007-10-09 |
| 7280212 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +3 more | 2007-10-09 |
| 7102749 | Overlay alignment mark design | — | 2006-09-05 |
| 6894783 | Overlay alignment mark design | — | 2005-05-17 |
| 6614520 | Method for inspecting a reticle | Christian G. Desplat, Lance Glasser | 2003-09-02 |
| 6580505 | Overlay alignment mark design | — | 2003-06-17 |
| 6577389 | System and methods for inspection of transparent mask substrates | Steve Biellak, Stanley Stokowski | 2003-06-10 |
| 6462818 | Overlay alignment mark design | — | 2002-10-08 |
| 6079256 | Overlay alignment measurement of wafers | — | 2000-06-27 |
| 6023338 | Overlay alignment measurement of wafers | — | 2000-02-08 |
| 5889593 | Optical system and method for angle-dependent reflection or transmission measurement | — | 1999-03-30 |
| 4712913 | Linear-scanned-array wavefront sensor | — | 1987-12-15 |
| 4687332 | Self-referencing scan-shear interferometer | — | 1987-08-18 |
| 4583855 | Optical phase measuring apparatus | — | 1986-04-22 |
| 4480916 | Phase-modulated polarizing interferometer | Wayne W. Metheny | 1984-11-06 |