Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453648 | Charged particle bean device and information-processing device | Yoshinobu Kimura, Toshihide Agemura, Takeshi Ogashiwa, Junichiro Tomizawa | 2019-10-22 |
| 10256068 | Charged particle beam apparatus | Momoyo Enyama, Yasuhiro Shirasaki | 2019-04-09 |
| 10121634 | Charged particle beam device and charged particle beam measurement method | Yoshinobu Kimura, Hideyuki Kazumi, Hajime Kawano, Junichiro Tomizawa | 2018-11-06 |
| 10121632 | Charged particle beam apparatus | Nobuhiro Okai, Naomasa Suzuki, Tomoyasu Shojo | 2018-11-06 |
| 9846133 | Semiconductor inspection device including a counter electrode with adjustable potentials used to obtain images for detection of defects, and inspection method using charged particle beam | Yoshinobu Kimura, Hiroya Ohta, Renichi Yamada, Toshiyuki Ohno, Yuki Mori | 2017-12-19 |
| 9659744 | Charged particle beam apparatus and inspection method using the same | Naomasa Suzuki, Hideyuki Kazumi, Shoji Hotta, Yoshinobu Kimura | 2017-05-23 |
| 9508611 | Semiconductor inspection method, semiconductor inspection device and manufacturing method of semiconductor element | Yoshinobu Kimura, Hiroya Ohta, Renichi Yamada, Hirotaka Hamamura, Toshiyuki Ohno +2 more | 2016-11-29 |
| 9236220 | Electronic microscope, setting method of observation condition of electronic microscope, and observation method using electronic microscope | Hideyuki Kazumi, Takafumi Miwa, Yoshinobu Kimura, Hajime Kawano | 2016-01-12 |
| 9202668 | Observation specimen for use in electron microscopy, electron microscopy, electron microscope, and device for producing observation specimen | Takafumi Miwa, Yoichi Ose, Eiko Nakazawa, Mami Konomi, Shunya Watanabe +1 more | 2015-12-01 |
| 8907279 | Electron microscope and image capturing method using electron beam | Hideyuki Kazumi, Yuzuru Mochizuki, Takafumi Miwa, Yoshinobu Kimura, Toshiyuki Yokosuka | 2014-12-09 |
| 8586920 | Charged particle beam apparatus | Hiroshi Makino | 2013-11-19 |
| 7910884 | Apparatus and method for inspection and measurement | Zhaohui Cheng | 2011-03-22 |
| 7633303 | Semiconductor wafer inspection apparatus | Takashi Furukawa, Zhaohui Cheng | 2009-12-15 |