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Semiconductor devices suitable for narrow pitch applications and methods of fabrication thereof |
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Post treatment methods for oxide layers on semiconductor devices |
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2016-08-30 |
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Method of improving oxide growth rate of selective oxidation processes |
Norman L. Tam, Balasubramanian Ramachandran, Martin John Ripley |
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Method and apparatus for single step selective nitridation |
Udayan Ganguly, Theresa Kramer Guarini, Matthew S. Rogers, Johanes S. Swenberg, Malcolm J. Bevan |
2015-05-05 |
| 8916484 |
Remote plasma radical treatment of silicon oxide |
Christopher S. Olsen |
2014-12-23 |
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Thermal reactor with improved gas flow distribution |
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2014-11-18 |
| 8748259 |
Method and apparatus for single step selective nitridation |
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2014-06-10 |
| 8741785 |
Remote plasma radical treatment of silicon oxide |
Christopher S. Olsen |
2014-06-03 |
| 8608853 |
Thermal reactor with improved gas flow distribution |
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2013-12-17 |
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Method of improving oxide growth rate of selective oxidation processes |
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2013-10-01 |
| 8497193 |
Method of thermally treating silicon with oxygen |
Sundar Ramamurthy, Vedapuram S. Achutharaman, Cory Czarnik, Mehran Behdjat, Christopher S. Olsen |
2013-07-30 |
| 8492292 |
Methods of forming oxide layers on substrates |
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2013-07-23 |
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Methods for forming conformal oxide layers on semiconductor devices |
Agus Sofian Tjandra, Christopher S. Olsen, Johanes F. Swenberg |
2013-05-07 |
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Water cooled gas injector |
Sundar Ramamurthy, Vedapuram S. Achutharaman, Cory Czarnik, Mehran Behdjat, Christopher S. Olsen |
2013-04-02 |
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Methods for oxidation of a semiconductor device |
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2012-06-26 |
| 8056500 |
Thermal reactor with improved gas flow distribution |
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Dual frequency low temperature oxidation of a semiconductor device |
Kai Ma, Christopher S. Olsen |
2011-10-25 |
| 7972441 |
Thermal oxidation of silicon using ozone |
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2011-07-05 |
| 7951728 |
Method of improving oxide growth rate of selective oxidation processes |
Norman L. Tam, Balasubramanian Ramachandran, Martin John Ripley |
2011-05-31 |
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Methods for oxidation of a semiconductor device |
Rajesh Mani, Norman L. Tam, Timothy Weidman |
2011-05-24 |
| 7547633 |
UV assisted thermal processing |
Joseph M. Ranish |
2009-06-16 |
| 6713127 |
Methods for silicon oxide and oxynitride deposition using single wafer low pressure CVD |
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2004-03-30 |
