Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8983028 | Density profile measurement by detecting backscattered radiation with position-sensitive detector | Alex Kulik, Alexander Joseph Esin, Nikolay Baturin, Michael George Brosseau | 2015-03-17 |
| 7628863 | Heated gas box for PECVD applications | Inna Shmurun, Thomas Nowak, Nancy Fung, Brian Hopper, Andrzej Kaszuba +1 more | 2009-12-08 |
| 7024105 | Substrate heater assembly | Mark Fodor, Sophia M. Velastegui, Visweswaren Sivaramakrishnan, Peter Wai-Man Lee, Mario David Silvetti | 2006-04-04 |
| 7008484 | Method and apparatus for deposition of low dielectric constant materials | Kang Sub Yim, Dian Sugiarto, Peter Wai-Man Lee, Ellie Yieh | 2006-03-07 |
| 6946033 | Heated gas distribution plate for a processing chamber | Lun Tsuei, Ju-Hyung Lee, Juan Carlos Rocha-Alvarez, Inna Shmurun, Maosheng Zhao +2 more | 2005-09-20 |