Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11894211 | Electron beam apparatus and method for controlling electron beam apparatus | Erina Kawamoto, Soichiro Matsunaga, Keigo Kasuya, Takashi Doi, Tetsuya Sawahata +1 more | 2024-02-06 |
| 11508544 | Thermoelectric field emission electron source and electron beam application device | Soichiro Matsunaga, Keigo Kasuya, Aki Takei, Hajime Kawano, Takashi Doi | 2022-11-22 |
| 11227740 | Electron gun and electron beam application device | Soichiro Matsunaga, Yasunari Sohda, Makoto Sakakibara, Hajime Kawano, Takashi Doi | 2022-01-18 |
| 10903037 | Charged particle beam device | Keigo Kasuya, Shuhei Ishikawa, Kenji Tanimoto, Hajime Kawano, Hideo Todokoro +2 more | 2021-01-26 |
| 10804084 | Vacuum apparatus | Keigo Kasuya | 2020-10-13 |
| 9837243 | Ion pump and charged particle beam device using the same | Keigo Kasuya, Takeshi Kawasaki, Takashi Ohshima | 2017-12-05 |
| 9006654 | Charged particle beam apparatus | Soichiro Matsunaga, Hajime Kawano | 2015-04-14 |
| 8866371 | Electric field discharge-type electron source | Takashi Ohshima, Sukehiro Ito | 2014-10-21 |
| 8772735 | Charged particle beam apparatus, and method of controlling the same | Keigo Kasuya, Takashi Ohshima, Shigeru Kokubo, Hideo Todokoro | 2014-07-08 |
| 8686380 | Charged particle beam apparatus | Takashi Ohshima, Sho Takami, Makoto Ezumi, Takashi Doi, Yuji Kasai | 2014-04-01 |
| 8426835 | Charged particle radiation device | Keigo Kasuya, Takashi Ohshima, Masashi Kimura | 2013-04-23 |
| 8319193 | Charged particle beam apparatus, and method of controlling the same | Keigo Kasuya, Takashi Ohshima, Shigeru Kokubo, Hideo Todokoro | 2012-11-27 |
| 8268209 | Pattern forming method and its mold | Masahiko Ogino, Akihiro Miyauchi, Takashi Ando, Chiseki Haginoya, Susumu Komoriya +3 more | 2012-09-18 |
| 7781743 | Charged particle beam system and method for evacuation of the system | Takashi Ohshima | 2010-08-24 |
| 7759652 | Electron lens and charged particle beam apparatus | Takashi Ohshima, Mitsugu Sato, Yutaka Kaneko, Koichiro Takeuchi | 2010-07-20 |
| 7745237 | Pattern forming method and pattern forming system | Yasunari Sohda, Masahiko Ogino | 2010-06-29 |
| 7615765 | Charged particle beam apparatus | Takashi Ohshima, Toshihide Agemura, Mitsugu Sato | 2009-11-10 |
| 7582885 | Charged particle beam apparatus | Takashi Ohshima, Toshihide Agemura, Mitsugu Sato, Takashi Furukawa | 2009-09-01 |
| 7144298 | Method for manufacturing semiconductor device and apparatus for manufacturing thereof | Ui Yamaguchi | 2006-12-05 |
| 6908860 | Method for manufacturing semiconductor device and apparatus for manufacturing thereof | Ui Yamaguchi | 2005-06-21 |
| 6777337 | Planarizing method of semiconductor wafer and apparatus thereof | Kan Yasui, Masayuki Nagasawa, Ui Yamaguchi, Yoshio Kawamura | 2004-08-17 |
| 6734103 | Method of polishing a semiconductor device | Ui Yamaguchi, Seiichi Kondo, Kan Yasui, Yoshio Kawamura | 2004-05-11 |
| 6723144 | Semiconductor device fabricating method | Kan Yasui, Ryousei Kawai, Sadayuki Nishimura, Masahiko Sato, Yoshio Kawamura +1 more | 2004-04-20 |
| 6663468 | Method for polishing surface of semiconductor device substrate | Yoshio Kawamura, Kan Yasui, Masahiko Sato, Masayuki Nagasawa, Kunio Harada +2 more | 2003-12-16 |
| 6612912 | Method for fabricating semiconductor device and processing apparatus for processing semiconductor device | Kan Yasui, Shigeo Moriyama, Yoshio Kawamura, Ryousei Kawai, Sadayuki Nishimura +1 more | 2003-09-02 |