| 8236580 |
Copper contamination detection method and system for monitoring copper contamination |
Jay Burnham, Joseph K. V. Comeau, Leslie Peter Crane, James R. Elliott, James S. Nakos +1 more |
2012-08-07 |
| 7957917 |
Copper contamination detection method and system for monitoring copper contamination |
Jay Burnham, Joseph K. V. Comeau, Leslie Peter Crane, James R. Elliott, James S. Nakos +1 more |
2011-06-07 |
| 7888142 |
Copper contamination detection method and system for monitoring copper contamination |
Jay Burnham, Joseph K. V. Comeau, Leslie Peter Crane, James R. Elliott, James S. Nakos +1 more |
2011-02-15 |
| 7855130 |
Corrosion inhibitor additives to prevent semiconductor device bond-pad corrosion during wafer dicing operations |
Robert R Cadieux, Timothy C. Krywanczyk |
2010-12-21 |
| 7332054 |
Etch apparatus |
Arne Ballantine, Emily E. Fisch, Gary L. Milo, Ronald A. Warren |
2008-02-19 |
| 6812193 |
Slurry for mechanical polishing (CMP) of metals and use thereof |
Michael T. Brigham, Donald F. Canaperi, Michael A. Cobb, William J. Cote, Kenneth M. Davis +9 more |
2004-11-02 |
| 6758912 |
Method of inhibiting contaminants using dilute acid rinse |
Virginia Chi-Chuen Chao, Thomas B. Faure, Thomas M. Wagner |
2004-07-06 |
| 6699400 |
Etch process and apparatus therefor |
Arne Ballantine, Emily E. Fisch, Gary L. Milo, Ronald A. Warren |
2004-03-02 |
| 6494966 |
Method of minimizing contaminating deposits using dilute acid rinse |
Virginia Chi-Chuen Chao, Thomas B. Faure, Thomas M. Wagner |
2002-12-17 |
| 6191085 |
Method for cleaning semiconductor devices |
Emanuel I. Cooper, Glenn W. Gale, Rangarajan Jagannathan, Harald Okorn-Schmidt, David L. Rath |
2001-02-20 |
| 6162565 |
Dilute acid rinse after develop for chrome etch |
Virginia Chi-Chuen Chao, Thomas B. Faure, Thomas M. Wagner |
2000-12-19 |
| 5962384 |
Method for cleaning semiconductor devices |
Emanuel I. Cooper, Glenn W. Gale, Rangarajan Jagannathan, Harald Okorn-Schmidt, David L. Rath |
1999-10-05 |
| 5459001 |
Low stress electrodeposition of gold for x-ray mask fabrication |
Thomas B. Faure, Steven C. Nash |
1995-10-17 |
| 5318687 |
Low stress electrodeposition of gold for X-ray mask fabrication |
Thomas B. Faure, Steven C. Nash |
1994-06-07 |
