Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406197 | Prediction and metrology of stochastic photoresist thickness defects | Anatoly Burov, Guy Parsey, Kunlun Bai, Cao Zhang, John S. Graves +2 more | 2025-09-02 |
| 11966156 | Lithography mask repair by simulation of photoresist thickness evolution | Guy Parsey, Kunlun Bai, Xiaohan Li, Anatoly Burov, Cao Zhang +2 more | 2024-04-23 |
| 11761880 | Process-induced distortion prediction and feedforward and feedback correction of overlay errors | Haiguang Chen, Jaydeep Sinha, Sathish Veeraraghavan | 2023-09-19 |
| 11682570 | Process-induced displacement characterization during semiconductor production | Mark D. Smith, Ady Levy, Prasanna Dighe, Dieter Mueller | 2023-06-20 |
| 11164768 | Process-induced displacement characterization during semiconductor production | Mark D. Smith, Ady Levy, Prasanna Dighe, Dieter Mueller | 2021-11-02 |
| 10788759 | Prediction based chucking and lithography control optimization | Bin-Ming Benjamin Tsai, Oreste Donzella, Jaydeep Sinha | 2020-09-29 |
| 10576603 | Patterned wafer geometry measurements for semiconductor process controls | Jaydeep Sinha | 2020-03-03 |
| 10401279 | Process-induced distortion prediction and feedforward and feedback correction of overlay errors | Haiguang Chen, Jaydeep Sinha, Sathish Veeraraghavan | 2019-09-03 |
| 10379061 | Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool | Haiguang Chen, Jaydeep Sinha, Sergey Kamensky, Sathish Veeraraghavan | 2019-08-13 |
| 10249523 | Overlay and semiconductor process control using a wafer geometry metric | Sathish Veeraraghavan, Jaydeep Sinha | 2019-04-02 |
| 10036964 | Prediction based chucking and lithography control optimization | Bin-Ming Benjamin Tsai, Oreste Donzella, Jaydeep Sinha | 2018-07-31 |
| 10025894 | System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking | Sathish Veeraraghavan, Jaydeep Sinha, Haiguang Chen, Michael D. Kirk | 2018-07-17 |
| 9779202 | Process-induced asymmetry detection, quantification, and control using patterned wafer geometry measurements | Jaydeep Sinha, Jong Hoon Kim | 2017-10-03 |
| 9707660 | Predictive wafer modeling based focus error prediction using correlations of wafers | Jaydeep Sinha, Wei Chang, Krishna Rao | 2017-07-18 |
| 9558545 | Predicting and controlling critical dimension issues and pattern defectivity in wafers using interferometry | Sathish Veeraraghavan, Soham Dey, Jaydeep Sinha | 2017-01-31 |
| 9546862 | Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool | Haiguang Chen, Jaydeep Sinha, Sergey Kamensky, Sathish Veeraraghavan | 2017-01-17 |
| 9513565 | Using wafer geometry to improve scanner correction effectiveness for overlay control | Craig MacNaughton, Sathish Veeraraghavan, Jaydeep Sinha, Amir Azordegan | 2016-12-06 |
| 9430593 | System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking | Sathish Veeraraghavan, Jaydeep Sinha, Haiguang Chen, Michael D. Kirk | 2016-08-30 |
| 9373165 | Enhanced patterned wafer geometry measurements based design improvements for optimal integrated chip fabrication performance | Amir Azordegan, Craig MacNaughton, Jaydeep Sinha | 2016-06-21 |
| 9354526 | Overlay and semiconductor process control using a wafer geometry metric | Sathish Veeraraghavan, Jaydeep Sinha | 2016-05-31 |
| 9177370 | Systems and methods of advanced site-based nanotopography for wafer surface metrology | Haiguang Chen, Sergey Kamensky, Jaydeep Sinha | 2015-11-03 |
| 9052190 | Bright-field differential interference contrast system with scanning beams of round and elliptical cross-sections | Ali Salehpour, Jaydeep Sinha, Kurt L. Haller, George Kren, Jiayao Zhang +1 more | 2015-06-09 |
| 9029810 | Using wafer geometry to improve scanner correction effectiveness for overlay control | Craig MacNaughton, Sathish Veeraraghavan, Jaydeep Sinha, Amir Azordegan | 2015-05-12 |