Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998405 | Low-defect graphene-based devices and interconnects | Ian A. Young, Wilman Tsai | 2021-05-04 |
| 9932671 | Precursor and process design for photo-assisted metal atomic layer deposition (ALD) and chemical vapor deposition (CVD) | James M. Blackwell, Patricio E. Romero, Scott B. Clendenning, Grant Kloster, Florian Gstrein +2 more | 2018-04-03 |
| 9786559 | Process and material for preventing deleterious expansion of high aspect ratio copper filled through silicon vias (TSVs) | Scott B. Clendenning, Patricio E. Romero, Paul B. Fischer, Robert Edgeworth | 2017-10-10 |
| 8764905 | Cleaning organic residues from EUV optics and masks | Christof Krautschik | 2014-07-01 |
| 8551675 | Mounting a pellicle to a frame | Florence Eschbach, Alexander Tregub, Fu-Chang Lo | 2013-10-08 |
| 8319295 | Use of F-based gate etch to passivate the high-k/metal gate stack for deep submicron transistor technologies | Nadine Collaert, Marc Demand, Werner Boullart, Adelina K. Shickova | 2012-11-27 |
| 8211812 | Method for fabricating a high-K dielectric layer | Lars-Ake Ragnarsson, Kazuhiko Yamamoto, Tom Schram, Wim Deweerd, David Paul Brunco +2 more | 2012-07-03 |
| 8134684 | Immersion lithography using hafnium-based nanoparticles | Jeffrey Byers | 2012-03-13 |
| 8124230 | Non-aggregating nanoparticles and the use thereof | Aristeidis BAKANDRITSOS, Michael F. Zettel, Markos Trikeriotis, Robert Rodriguez, Emmanuel P. Giannelis +2 more | 2012-02-28 |
| 8012651 | Mounting a pellicle to a frame | Florence Eschbach, Alexander Tregub, Fu-Chang Lo | 2011-09-06 |
| 7732120 | Method for making soft pellicles | Chris K. Van Peski | 2010-06-08 |
| 7709180 | Soft pellicle and method of making same | Chris K. Van Peski | 2010-05-04 |
| 7579285 | Atomic layer deposition method for depositing a layer | Matty Caymax, Stefan De Gendt, Annelies Delabie, Lars-Ake Ragnarsson | 2009-08-25 |
| 7504192 | Soft pellicle for 157 and 193 nm and method of making same | Chris K. Van Peski | 2009-03-17 |
| 7316869 | Mounting a pellicle to a frame | Florence Eschbach, Alexander Tregub, Fu-Chang Lo | 2008-01-08 |
| 7264853 | Attaching a pellicle frame to a reticle | Florence Eschbach, Alexander Tregub, Fu-Chang Lo | 2007-09-04 |
| 6790796 | Nonwovens forming or conveying fabrics with enhanced surface roughness and texture | Scott Smith, Mark Levine | 2004-09-14 |
| 5629210 | Rapid screening test for smith-lemli-opitz syndrome | David M. Hercules, Edwin NAYLOR | 1997-05-13 |