Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7732120 | Method for making soft pellicles | Paul A. Zimmerman | 2010-06-08 |
| 7709180 | Soft pellicle and method of making same | Paul A. Zimmerman | 2010-05-04 |
| 7504192 | Soft pellicle for 157 and 193 nm and method of making same | Paul A. Zimmerman | 2009-03-17 |