| 12315695 |
Sample holder, intermembrane distance adjustment mechanism, and charged particle beam device |
Mitsuhiro Nakamura, Toshihiko Ogura |
2025-05-27 |
| 12265041 |
Thin film damage detection function and charged particle beam device |
Mitsuhiro Nakamura, Toshihiko Ogura |
2025-04-01 |
| 11538659 |
Charged particle beam device, autofocus processing method of charged particle beam device, and detector |
Mitsuhiro Nakamura |
2022-12-27 |
| 11348758 |
Charged particle beam device |
Anoru Suga, Shuhei YABU, Kazuki ISHIZAWA |
2022-05-31 |
| 11348757 |
Charged particle beam device |
Shuhei YABU, Shin Imamura, Masaaki Komatsu |
2022-05-31 |
| 10755396 |
Image forming apparatus |
Momoyo Enyama, Yasuhiro Shirasaki, Makoto Sakakibara |
2020-08-25 |
| 10438771 |
Measurement device, calibration method of measurement device, and calibration member |
Yoshinori Nakayama, Masaru Matsuzaki, Hiroki Kawada, Yoshinori Momonoi, Zhigang Wang |
2019-10-08 |
| 10262830 |
Scanning electron microscope and electron trajectory adjustment method therefor |
Daisuke Bizen, Hideo Morishita, Hiroya Ohta |
2019-04-16 |
| 9521372 |
Pattern measuring apparatus, pattern measuring method, and computer-readable recording medium on which a pattern measuring program is recorded |
Yoshinori Momonoi, Koichi Hamada, Yuji Takagi, Hideyuki Kazumi |
2016-12-13 |
| 9472376 |
Scanning electron microscope |
Toshiyuki Yokosuka, Chahn Lee, Hideyuki Kazumi, Hiroshi Makino, Yuzuru Mizuhara +2 more |
2016-10-18 |
| 9245711 |
Charged particle beam apparatus and image forming method |
Yusuke Abe, Zhigang Wang |
2016-01-26 |
| 9208994 |
Electron beam apparatus for visualizing a displacement of an electric field |
Takashi Ohshima, Hideo Morishita |
2015-12-08 |
| 9202667 |
Charged particle radiation device with bandpass detection |
Tetsuya Sawahata, Yasuko Watanabe, Mitsugu Sato, Sukehiro Ito, Takashi Ohshima +1 more |
2015-12-01 |
| 9029766 |
Scanning electron microscope |
Hideo Morishita, Takashi Ohshima, Sukehiro Ito |
2015-05-12 |
| 8629395 |
Charged particle beam apparatus |
Hideo Morishita, Takashi Ohshima, Mitsugu Sato, Tetsuya Sawahata, Sukehiro Ito +1 more |
2014-01-14 |
| 8217363 |
Scanning electron microscope |
Takashi Ohshima, Mitsugu Sato |
2012-07-10 |
| 8097848 |
Scanning electron microscope |
Sukehiro Ito, Nagahide Ishida, Shinichi Tomita, Wataru Kotake |
2012-01-17 |
| 7755045 |
Scanning electron microscope |
Sukehiro Ito, Shinichi Tomita, Junichi Katane |
2010-07-13 |
| 7511271 |
Scanning electron microscope |
Sukehiro Ito, Shinichi Tomita, Junichi Katane |
2009-03-31 |
| 7504624 |
Charged particle beam device |
Takeshi Kawasaki, Tomonori Nakano, Momoyo Enyama |
2009-03-17 |