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Image determining device to determine the state of a subject |
Tetsuya Yamamoto, Masahiro Nei, Isao Totsuka, Tomoyuki Matsuyama, Satoshi Hagiwara +1 more |
2023-12-26 |
| 11055522 |
Image determining device to determine the state of a subject |
Tetsuya Yamamoto, Masahiro Nei, Isao Totsuka, Tomoyuki Matsuyama, Satoshi Hagiwara +1 more |
2021-07-06 |
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Image determining device to determine the state of a subject |
Tetsuya Yamamoto, Masahiro Nei, Isao Totsuka, Tomoyuki Matsuyama, Satoshi Hagiwara +1 more |
2019-04-30 |
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Guidance system, detection device, and position assessment device |
Masakazu Sekiguchi, Tetsuya Yamamoto, Masahiro Nei, Satoshi Hagiwara, Isao Totsuka +1 more |
2019-04-09 |
| 9047751 |
Image determining device to determine the state of a subject |
Tetsuya Yamamoto, Masahiro Nei, Isao Totsuka, Tomoyuki Matsuyama, Satoshi Hagiwara +1 more |
2015-06-02 |
| 6552775 |
Exposure method and apparatus |
Tomohiro Katsume |
2003-04-22 |
| RE37762 |
Scanning exposure apparatus and exposure method |
Seiji Miyazaki, Kei Nara, Masami Seki, Tomohide Hamada |
2002-06-25 |
| 6325516 |
Exposure apparatus and field stop thereof |
Tomoyuki Watanabe, Hideji Goto, Noritsugu Hanazaki |
2001-12-04 |
| 6288772 |
Scanning exposure method and scanning type exposure apparatus |
Tadaaki Shinozaki |
2001-09-11 |
| RE37361 |
Scanning type exposure apparatus and exposure method |
Susumu Mori, Tsuyoshi Naraki, Masami Seki, Seiji Miyazaki, Tsuyohsi Narabe +1 more |
2001-09-11 |
| 6213607 |
Exposure apparatus and field stop thereof |
Tomoyuki Watanabe, Hideji Goto, Noritsugu Hanazaki |
2001-04-10 |
| 5999244 |
Projection exposure apparatus, method for correcting positional discrepancy of projected image, and method for determining image formation characteristic of projection optical system |
Kei Hara, Seiji Miyazaki, Hideki Koitabashi, Yoichi Hamashima, Hiroshi Kitano +1 more |
1999-12-07 |
| 5978094 |
Alignment device and method based on imaging characteristics of the image pickup system |
Tsuyoshi Narabe, Kei Nara |
1999-11-02 |
| 5936712 |
Exposure method and apparatus including focus control |
Masanobu Ito, Hideji Goto, Yoshiyuki Katamata |
1999-08-10 |
| 5640243 |
Position detection method |
Hideki Koitabashi, Junji Hazama |
1997-06-17 |
| 5625436 |
Scanning type exposure apparatus and exposure method |
Susumu Mori, Tsuyoshi Naraki, Masami Seki, Seiji Miyazaki, Tsuyoshi Narabe +1 more |
1997-04-29 |
| 5623343 |
Exposure method and apparatus |
Kei Nara, Seiji Miyazaki |
1997-04-22 |
| 5617181 |
Exposure apparatus and exposure method |
Hiroshi Shirasu, Tetsuo Kikuchi |
1997-04-01 |
| 5602620 |
Scanning exposure apparatus and exposure method |
Seiji Miyazaki, Kei Nara, Masami Seki |
1997-02-11 |
| 5581075 |
Multi-beam scanning projection exposure apparatus and method with beam monitoring and control for uniform exposure of large area |
Tsuyoshi Naraki, Hiroshi Shirasu, Tomohide Hamada, Tetsuo Kikuchi, Noriaki Yamamoto |
1996-12-03 |
| 5502313 |
Exposure apparatus and method having a measuring unit for measuring distances between a mask surface and a projection optical system |
Osamu Nakamura, Hideji Goto |
1996-03-26 |
| 5500736 |
Method of detecting positions |
Hideki Koitabashi, Junji Hazama |
1996-03-19 |
| 5486896 |
Exposure apparatus |
Junji Hazama, Hideji Goto, Masaichi Murakami |
1996-01-23 |
| 4687322 |
Projection optical apparatus |
Akikazu Tanimoto, Shoji Ishizaka, Yutaka Endo, Hiroyuki Suzuki |
1987-08-18 |