| 12100575 |
Plasma processing devices having multi-port valve assemblies |
Daniel Arthur Brown, Michael C. Kellogg, Allan K. Ronne, James E. Tappan |
2024-09-24 |
| 11282737 |
Moving substrate transfer chamber |
Daniel Arthur Brown, Allan K. Ronne, Christopher W. Burkhart |
2022-03-22 |
| 10037869 |
Plasma processing devices having multi-port valve assemblies |
Daniel Arthur Brown, Michael C. Kellogg, Allan K. Ronne, James E. Tappan |
2018-07-31 |
| 9689533 |
Coating method for gas delivery system |
Ian Kenworthy, Duane Outka, Fangli Hao, Yijun Du |
2017-06-27 |
| 9687908 |
Method of casting internal features |
— |
2017-06-27 |
| 9613834 |
Replaceable upper chamber section of plasma processing apparatus |
Harmeet Singh, Michael Kang |
2017-04-04 |
| 9490135 |
Movable chamber liner plasma confinement screen combination for plasma processing apparatuses |
Danny Brown |
2016-11-08 |
| 9318349 |
Plasma chamber top piece assembly |
Keith Comendant |
2016-04-19 |
| 8852685 |
Coating method for gas delivery system |
Ian Kenworthy, Duane Outka, Fangli Hao, Yijun Du |
2014-10-07 |
| 8597428 |
Vacuum sealing radio frequency (RF) and low frequency conducting actuator |
Danny Brown, Allan K. Ronne, Arthur H. Sato, John Daugherty |
2013-12-03 |
| 8597462 |
Movable chamber liner plasma confinement screen combination for plasma processing apparatuses |
Danny Brown |
2013-12-03 |
| 8540843 |
Plasma chamber top piece assembly |
Keith Comendant |
2013-09-24 |
| 8524099 |
Methods for accessing a process chamber using a dual zone gas injector with improved optical access |
Jeff A. Bogart, Harmeet Singh |
2013-09-03 |
| 8282987 |
Aluminum-plated components of semiconductor material and methods of manufacturing the components |
Ian Kenworthy, Kelly Fong |
2012-10-09 |
| 8128750 |
Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the components |
Ian Kenworthy, Kelly Fong |
2012-03-06 |
| 7928366 |
Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access |
Jeff A. Bogart, Harmeet Singh |
2011-04-19 |
| 7780791 |
Apparatus for an optimized plasma chamber top piece |
Keith Comendant |
2010-08-24 |
| 6901808 |
Capacitive manometer having reduced process drift |
Neil Benjamin, Jeffrey W. Fish |
2005-06-07 |
| 6108391 |
Apparatus for performing jet pump riser pipe repairs |
Gerald A. Deaver, David B. Drendel, Siamak Bourbour, Arunachalam Mahadevan |
2000-08-22 |
| 5977504 |
Method and apparatus for guiding multiple filler wires in welding groove |
Henry Peter Offer |
1999-11-02 |
| 5958261 |
Apparatus for welding with preheated filler material |
Henry Peter Offer |
1999-09-28 |
