Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7186657 | Method for patterning HfO2-containing dielectric | Wei-Tsun Shiau, Chien-Ting Lin, Jiunn-Ren Hwang | 2007-03-06 |
| 6919168 | Masking methods and etching sequences for patterning electrodes of high density RAM capacitors | Steve S. Y. Mak, True-Lon Lin, Chentsau Ying, John W. Schaller | 2005-07-19 |
| 6893893 | Method of preventing short circuits in magnetic film stacks | Padmapani Nallan, Ajay Kumar, Guangxiang Jin, Ralph Kerns | 2005-05-17 |
| 6821907 | Etching methods for a magnetic memory cell stack | Guangxiang Jin, Xiaoyi Chen | 2004-11-23 |
| 6777342 | Method of plasma etching platinum | — | 2004-08-17 |
| 6770567 | Method of reducing particulates in a plasma etch chamber during a metal etch process | Yong Deuk Ko, Se Jin Oh, Chan Ouk Jung | 2004-08-03 |
| 6749770 | Method of etching an anisotropic profile in platinum | Chentsau Ying, Kang-Lie Chiang, Steve S. Y. Mak | 2004-06-15 |
| 6730561 | Method of forming a cup capacitor | Guangxiang Jin | 2004-05-04 |
| 6709609 | Plasma heating of a substrate with subsequent high temperature etching | Xiaoyi Chen | 2004-03-23 |
| 6692903 | Substrate cleaning apparatus and method | Haojiang Chen, James S. Papanu, Mark Kawaguchi, Harald Herchen, Guangxiang Jin +1 more | 2004-02-17 |
| 6692648 | Method of plasma heating and etching a substrate | Xiaoyi Chen | 2004-02-17 |
| 6579796 | Method of etching platinum using a silicon carbide mask | Chentsau Ying, Luc Van Autryve | 2003-06-17 |
| 6541380 | Plasma etching process for metals and metal oxides, including metals and metal oxides inert to oxidation | Chentsau Ying | 2003-04-01 |
| 6482745 | Etching methods for anisotropic platinum profile | — | 2002-11-19 |
| 6436838 | Method of patterning lead zirconium titanate and barium strontium titanate | Chen Tsan Ying, Hideyuki Yamauchi, Seayoul Park, Yohei Kawase | 2002-08-20 |
| 6368517 | Method for preventing corrosion of a dielectric material | Kang-Lie Chiang, Guangxiang Jin | 2002-04-09 |
| 6323132 | Etching methods for anisotropic platinum profile | Chentsau Ying, Kang-Lie Chiang, Steve S. Y. Mak | 2001-11-27 |
| 6277251 | Apparatus and method for shielding a dielectric member to allow for stable power transmission into a plasma processing chamber | Steve S. Y. Mak, Yan Ye | 2001-08-21 |
| 6277762 | Method for removing redeposited veils from etched platinum | — | 2001-08-21 |
| 6270687 | RF plasma method | Yan Ye, Donald Olgado, Avi Tepman, Diana Xiaobing Ma, Gerald Yin +2 more | 2001-08-07 |
| 6265318 | Iridium etchant methods for anisotropic profile | Chentsau Ying, Guang Xiang Jin, Steve S. Y. Mak | 2001-07-24 |
| 6087265 | Method for removing redeposited veils from etched platinum | — | 2000-07-11 |
| 6071372 | RF plasma etch reactor with internal inductive coil antenna and electrically conductive chamber walls | Yan Ye, Donald Olgado, Avi Tepman, Diana Xiaobing Ma, Gerald Yin +2 more | 2000-06-06 |
| 6037264 | Method for removing redeposited veils from etched platinum | — | 2000-03-14 |
| 5174856 | Method for removal of photoresist over metal which also removes or inactivates corrosion-forming materials remaining from previous metal etch | Steve Mak | 1992-12-29 |