| 12117726 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen +18 more |
2024-10-15 |
| 11754918 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen +18 more |
2023-09-12 |
| RE49297 |
Lithographic apparatus and a device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Gerardus Adrianus Antonius Maria Kusters, Thibault Simon Mathieu Laurent, Marcio Alexandre Cano Miranda, Ruud Hendricus Martinus Johannes Bloks +2 more |
2022-11-15 |
| 11231646 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen +18 more |
2022-01-25 |
| 10191377 |
Lithographic apparatus and a device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Gerardus Adrianus Antonius Maria Kusters, Thibault Simon Mathieu Laurent, Marcio Alexandre Cano Miranda, Ruud Hendricus Martinus Johannes Bloks +2 more |
2019-01-29 |
| 9618858 |
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table |
Johannes Henricus Wilhelmus Jacobs, Gerardus Adrianus Antonius Maria Kusters, Thibault Simon Mathieu Laurent, Marcio Alexandre Cano Miranda, Ruud Hendrikus Martinus Johannes Bloks +2 more |
2017-04-11 |
| 8941815 |
Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Jozef Petrus Henricus Benschop, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Gerardus Adrianus Antonius Maria Kusters +2 more |
2015-01-27 |
| 8680493 |
Radiation conduit for radiation source |
Maikel Adrianus Cornelis Schepers, Markus Franciscus Antonius Eurlings, Franciscus Johannes Joseph Janssen, Bernard Jacob Andries Stommen, Hermanus Johannes Maria Kreuwel +3 more |
2014-03-25 |
| 8472003 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +11 more |
2013-06-25 |