Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8093070 | Method for leakage reduction in fabrication of high-density FRAM arrays | Kezhakkedath R. Udayakumar, Gregory B. Shinn, Theodore S. Moise, Scott R. Summerfelt | 2012-01-10 |
| 8053252 | Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean | Kezhakkedath R. Udayakumar, Lindsey Hall, Scott R. Summerfelt | 2011-11-08 |
| 7985603 | Ferroelectric capacitor manufacturing process | Robert J. Kraft, Kezhakkedath R. Udayakumar, Scott R. Summerfelt, Theodore S. Moise | 2011-07-26 |
| 7811882 | Hardmask manufacture in ferroelectric capacitors | — | 2010-10-12 |
| 7799582 | Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean | Kezhakkedath R. Udayakumar, Lindsey Hall, Scott R. Summerfelt | 2010-09-21 |
| 7723199 | Method for cleaning post-etch noble metal residues | Yaw S. Obeng, Kezhakkedath R. Udayakumar, Scott R. Summerfelt, Sanjeev Aggarwal, Lindsey Hall +2 more | 2010-05-25 |
| 7572698 | Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean | Kezhakkedath R. Udayakumar, Lindsey Hall, Scott R. Summerfelt | 2009-08-11 |
| 7572733 | Gas switching during an etch process to modulate the characteristics of the etch | Ping Jiang | 2009-08-11 |
| 7560385 | Etching systems and processing gas specie modulation | Ping Jiang | 2009-07-14 |
| 7425512 | Method for etching a substrate and a device formed using the method | Kezhakkedath R. Udayakumar, Ted S. Moise, Scott R. Summerfelt, Martin G. Albrecht, William W. Dostalik | 2008-09-16 |
| 7361599 | Integrated circuit and method | Theodore S. Moise, Guoqiang Xing, Mark Visokay, Justin Gaynor, Stephen Roy Gilbert +2 more | 2008-04-22 |
| 7300878 | Gas switching during an etch process to modulate the characteristics of the etch | Ping Jiang | 2007-11-27 |
| 7300883 | Method for patterning sub-lithographic features in semiconductor manufacturing | Brian Smith, James Walter Blatchford, Robert J. Kraft | 2007-11-27 |
| 7250349 | Method for forming ferroelectric memory capacitor | Mahesh Thakre, Scott R. Summerfelt | 2007-07-31 |
| 7029925 | FeRAM capacitor stack etch | Scott R. Summerfelt, Mahesh Thakre | 2006-04-18 |
| 6902939 | Integrated circuit and method | Theodore S. Moise, Guoqiang Xing, Mark Visokay, Justin Gaynor, Stephen Roy Gilbert +2 more | 2005-06-07 |
| 6872665 | Process flow for dual damescene interconnect structures | Guoqiang Xing, Andrew John McKerrow, Andrew Ralston, Zhicheng Tang, Kenneth Newton +2 more | 2005-03-29 |
| 6841396 | VIA0 etch process for FRAM integration | K. Udayakumar, Scott R. Summerfelt, Theodore S. Moise | 2005-01-11 |
| 6713342 | FeRAM sidewall diffusion barrier etch | Scott R. Summerfelt, Tomoyuki Sakoda, Chiu Chi | 2004-03-30 |
| 6605482 | Process for monitoring the thickness of layers in a microelectronic device | Maureen A. Hanratty, Katherine E. Violette, Rick L. Wise | 2003-08-12 |
| 6521042 | Semiconductor growth method | Alan Katz, Yung-Chung Kao, Theodore S. Moise | 2003-02-18 |
| 6509574 | Optocouplers having integrated organic light-emitting diodes | Han-Tzong Yuan, Tae Seung Kim, Simon Joshua Jacobs | 2003-01-21 |
| 6506616 | Photolithographic method for fabricating organic light-emitting diodes | Tae Seung Kim, Simon Joshua Jacobs | 2003-01-14 |
| 6455411 | Defect and etch rate control in trench etch for dual damascene patterning of low-k dielectrics | Ping Jiang, Kenneth Newton, Hiromi Sakima | 2002-09-24 |
| 6444542 | Integrated circuit and method | Theodore S. Moise, Guoqiang Xing, Mark Visokay, Justin Gaynor, Stephen Roy Gilbert +2 more | 2002-09-03 |