Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417916 | Tin oxide films in semiconductor device manufacturing | Jengyi Yu, Samantha Tan, Yu Jiang, Hui-Jung Wu, Richard Wise +2 more | 2025-09-16 |
| 12211691 | Dry development of resists | Timothy Weidman, Samantha Tan, Chenghao Wu, Kevin Li Gu | 2025-01-28 |
| 12183589 | Tin oxide mandrels in patterning | Jengyi Yu, Samantha Tan, Seongjun Heo, Sivananda K. Kanakasabapathy, Richard Wise +2 more | 2024-12-31 |
| 12105422 | Photoresist development with halide chemistries | Samantha Tan, Jengyi Yu, Da Li, Yiwen FAN, Yang Pan +5 more | 2024-10-01 |
| 12094711 | Tin oxide films in semiconductor device manufacturing | Jengyi Yu, Samantha Tan, Yu Jiang, Hui-Jung Wu, Richard Wise +2 more | 2024-09-17 |
| 12062538 | Atomic layer etch and selective deposition process for extreme ultraviolet lithography resist improvement | Jengyi Yu, Samantha Tan, Liu-Yang Yang, Chen-Wei Liang, Richard Wise +4 more | 2024-08-13 |
| 11355353 | Tin oxide mandrels in patterning | Jengyi Yu, Samantha Tan, Seongjun Heo, Sivananda K. Kanakasabapathy, Richard Wise +2 more | 2022-06-07 |
| 11322351 | Tin oxide films in semiconductor device manufacturing | Jengyi Yu, Samantha Tan, Yu Jiang, Hui-Jung Wu, Richard Wise +2 more | 2022-05-03 |
| 10546748 | Tin oxide films in semiconductor device manufacturing | Jengyi Yu, Samantha Tan, Yu Jiang, Hui-Jung Wu, Richard Wise +2 more | 2020-01-28 |
| 10103056 | Methods for wet metal seed deposition for bottom up gapfill of features | Samantha Tan, Taeseung Kim, Praveen Nalla, Novy Tjokro, Artur Kolics | 2018-10-16 |