Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11927891 | Apparatus and methods for determining the position of a target structure on a substrate | Nitesh Pandey, Duygu Akbulut, Sebastianus Adrianus GOORDEN | 2024-03-12 |
| 11761929 | Sensor apparatus for lithographic measurements | — | 2023-09-19 |
| 11536654 | Scatterometer and method of scatterometry using acoustic radiation | Maxim PISARENCO, Nitesh Pandey | 2022-12-27 |
| 11428925 | Position metrology apparatus and associated optical elements | Arjan Johannes Anton Beukman, Henricus Petrus Maria Pellemans, Nitish Kumar | 2022-08-30 |
| 11333985 | Position sensor | Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN, Duygu Akbulut, Johannes Antonius Gerardus Akkermans, Arie Jeffrey Den Boef | 2022-05-17 |
| 11300892 | Sensor apparatus and method for lithographic measurements | Simon Reinald HUISMAN | 2022-04-12 |
| 11099489 | Method of measuring a parameter of a lithographic process, metrology apparatus | Hugo Augustinus Joseph Cramer, Hilko Dirk Bos, Erik Johan Koop, Armand Eugene Albert Koolen, Han-Kwang Nienhuys +2 more | 2021-08-24 |
| 11086240 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Sebastianus Adrianus GOORDEN, Nitesh Pandey, Duygu Akbulut, Simon Reinaid Huisman | 2021-08-10 |
| 10845304 | Scatterometer and method of scatterometry using acoustic radiation | Maxim PISARENCO, Nitesh Pandey | 2020-11-24 |
| 10788766 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN, Duygu Akbulut, Simon Gijsbert Josephus Mathijssen | 2020-09-29 |
| 10678145 | Radiation receiving system | Nitesh Pandey, Armand Eugene Albert Koolen | 2020-06-09 |
| 10585363 | Alignment system | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Patricius Aloysius Jacobus Tinnemans, Adrianus Johannes Hendrikus Schellekens, Elahe Yeganegi Dastgerdi +3 more | 2020-03-10 |
| 10527959 | Position sensor, lithographic apparatus and method for manufacturing devices | Simon Reinald HUISMAN, Simon Gijsbert Josephus Mathijssen, Sebastianus Adrianus GOORDEN, Duygu Akbulut | 2020-01-07 |
| 10466601 | Alignment sensor for lithographic apparatus | Simon Gijsbert Josephus Mathijssen, Patricius Aloysius Jacobus Tinnemans, Scott Coston, Ronan James Havelin | 2019-11-05 |
| 10444638 | Method for parameter determination and apparatus thereof | Nitesh Pandey, Maxim PISARENCO | 2019-10-15 |
| 10317808 | Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method | Simon Reinald HUISMAN, Duygu Akbulut, Sebastianus Adrianus GOORDEN, Arie Jeffrey Den Boef | 2019-06-11 |
| 10101675 | Metrology apparatus, method of measuring a structure and lithographic apparatus | Simon Gijsbert Josephus Mathijssen | 2018-10-16 |