| 12386268 |
Method for calibrating simulation process based on defect-based process window |
Koenraad VAN INGEN SCHENAU, Vadim Yourievich TIMOSHKOV, Marleen KOOIMAN, Marie-Claire VAN LARE, Hermanus Adrianus DILLEN +5 more |
2025-08-12 |
| 12332573 |
Method for determining defectiveness of pattern based on after development image |
Marleen KOOIMAN, Maxim PISARENCO, Mark John Maslow, Bernardo Andres OYARZUN RIVERA, Wim Tjibbo Tel +1 more |
2025-06-17 |
| 12197136 |
Method of determining control parameters of a device manufacturing process |
Wim Tjibbo Tel, Mark John Maslow, Koenraad VAN INGEN SCHENAU, Patrick Warnaar, Roy ANUNCIADO +3 more |
2025-01-14 |
| 12044980 |
Method of manufacturing devices |
Wim Tjibbo Tel, Daan Maurits Slotboom, Vadim Yourievich TIMOSHKOV, Koen Wilhelmus Cornelis Adrianus Van Der Straten, Boris Menchtchikov +7 more |
2024-07-23 |
| 11822255 |
Process window based on defect probability |
Stefan Hunsche, Wim Tjibbo Tel, Anton Bernhard Van Oosten, Koenraad VAN INGEN SCHENAU, Gijsbert Rispens +1 more |
2023-11-21 |
| 11768442 |
Method of determining control parameters of a device manufacturing process |
Wim Tjibbo Tel, Mark John Maslow, Koenraad VAN INGEN SCHENAU, Patrick Warnaar, Roy ANUNCIADO +3 more |
2023-09-26 |
| 11513442 |
Method of determining control parameters of a device manufacturing process |
Wim Tjibbo Tel, Mark John Maslow, Koenraad VAN INGEN SCHENAU, Patrick Warnaar, Roy ANUNCIADO +3 more |
2022-11-29 |
| 11087065 |
Method of manufacturing devices |
Sunit S. Mahajan, Brennan Peterson, Koen Wilhelmus Cornelis Adrianus Van Der Straten, Antonio CORRADI, Pieter J. Woltgens |
2021-08-10 |
| 11079687 |
Process window based on defect probability |
Stefan Hunsche, Wim Tjibbo Tel, Anton Bernhard Van Oosten, Koenraad VAN INGEN SCHENAU, Gijsbert Rispens +1 more |
2021-08-03 |