Issued Patents All Time
Showing 76–100 of 109 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927393 | Method of in situ monitoring of supercritical fluid process conditions | Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, Robert J. Purtell, John P. Simons +1 more | 2005-08-09 |
| 6900142 | Inhibition of tin oxide formation in lead free interconnect formation | Emanual I. Cooper, Lisa A. Fanti, David E. Eichstadt, Stephen Kilpatrick, Henry A. Nye, III +1 more | 2005-05-31 |
| 6890855 | Process of removing residue material from a precision surface | Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, John P. Simons, Charles J. Taft | 2005-05-10 |
| 6875286 | Solid CO2 cleaning | Catherine Ivers, Kenneth McCullough, Wayne M. Moreau, Robert J. Purtell, John P. Simons +2 more | 2005-04-05 |
| 6838015 | Liquid or supercritical carbon dioxide composition | Dario L. Goldfarb, Pamela Jones, Kenneth McCullough, Wayne M. Moreau, Keith R. Pope +2 more | 2005-01-04 |
| 6834671 | Check valve for micro electro mechanical structure devices | Kenneth McCullough, Wayne M. Moreau, John P. Simons, Charles J. Taft, Richard P. Volant | 2004-12-28 |
| 6776885 | Integrated plating and planarization apparatus having a variable-diameter counterelectrode | Laertis Economikos, Hariklia Deligianni, Panayotis Andricacos | 2004-08-17 |
| 6773570 | Integrated plating and planarization process and apparatus therefor | Laertis Economikos, Hariklia Deligianni, Henry Grabarz, Bomy Chen | 2004-08-10 |
| 6739346 | Apparatus for cleaning filters | Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, John P. Simons, Charles J. Taft | 2004-05-25 |
| 6736906 | Turbine part mount for supercritical fluid processor | Matteo Flotta, Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, John P. Simons +1 more | 2004-05-18 |
| 6683008 | Process of removing ion-implanted photoresist from a workpiece | Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, John P. Simons, Charles J. Taft | 2004-01-27 |
| 6653233 | Process of providing a semiconductor device with electrical interconnection capability | Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, John P. Simons, Charles J. Taft +1 more | 2003-11-25 |
| 6639488 | MEMS RF switch with low actuation voltage | Hariklia Deligianni, Robert A. Groves, Christopher V. Jahnes, Jennifer Lund, Panayotis Andricacos +3 more | 2003-10-28 |
| 6622507 | Electromechanical device and a process of preparing same | Kenneth McCullough, Wayne M. Moreau, John P. Simons, Charles J. Taft, Richard P. Volant | 2003-09-23 |
| 6613641 | Production of metal insulator metal (MIM) structures using anodizing process | Richard P. Volant, Kevin S. Petrarca, Kenneth J. Stein | 2003-09-02 |
| 6579464 | Fixtures for processing a workpiece in a supercritical fluid | Matteo Flotta, Kenneth McCullough, Wayne M. Moreau, John P. Simons, Charles J. Taft | 2003-06-17 |
| 6570255 | Method for forming interconnects on semiconductor substrates and structures formed | Panayotis Andricacos, Cyril Cabral, Jr., Lynne M. Gignac, Wilma Jean Horkans, Kenneth P. Rodbell | 2003-05-27 |
| 6561220 | Apparatus and method for increasing throughput in fluid processing | Kenneth McCullough, Wayne M. Moreau, John P. Simons, Charles J. Taft | 2003-05-13 |
| 6468413 | Electrochemical etch for high tin solder bumps | Lisa A. Fanti, David E. Eichstadt | 2002-10-22 |
| 6457480 | Process and apparatus for cleaning filters | Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, John P. Simons, Charles J. Taft | 2002-10-01 |
| 6454869 | Process of cleaning semiconductor processing, handling and manufacturing equipment | Dario L. Goldfarb, Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, John P. Simons +1 more | 2002-09-24 |
| 6451375 | Process for depositing a film on a nanometer structure | Kenneth McCullough, Wayne M. Moreau, John P. Simons, Charles J. Taft | 2002-09-17 |
| 6429523 | Method for forming interconnects on semiconductor substrates and structures formed | Panayotis Andricacos, Cyril Cabral, Jr., Lynne M. Gignac, Wilma Jean Horkans, Kenneth P. Rodbell | 2002-08-06 |
| 6425956 | Process for removing chemical mechanical polishing residual slurry | Donald J. Delehanty, Kenneth McCullough, Wayne M. Moreau, John P. Simons, Charles J. Taft +1 more | 2002-07-30 |
| 6398875 | Process of drying semiconductor wafers using liquid or supercritical carbon dioxide | Dario L. Goldfarb, Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, John P. Simons +1 more | 2002-06-04 |