Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7034296 | Method of forming a sample image and charged particle beam apparatus | Mitsugu Sato, Atsushi Takane, Tadashi Otaka, Hideo Todokoro, Satoru Yamaguchi +1 more | 2006-04-25 |
| 7002151 | Scanning electron microscope | Satoru Yamaguchi, Osamu Komuro, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima +1 more | 2006-02-21 |
| 6954677 | Remote maintenance method for industrial device that generates maintenance charge information using received charge list | Juntaro Arima, Masaaki Inaba, Takeiki Aizono | 2005-10-11 |
| 6909930 | Method and system for monitoring a semiconductor device manufacturing process | Chie Shishido, Yuji Takagi, Masahiro Watanabe, Yasuhiro Yoshitake, Shunichi Matsumoto +3 more | 2005-06-21 |
| 6862485 | Remote maintenance method, industrial device, and semiconductor device | Juntaro Arima, Masaaki Inaba, Takeiki Aizono | 2005-03-01 |
| 6803573 | Scanning electron microscope | Satoru Yamaguchi, Osamu Komuro, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima +1 more | 2004-10-12 |
| 6792325 | Remote maintenance method, industrial device, and semiconductor device | Juntaro Arima, Masaaki Inaba, Takeiki Aizono | 2004-09-14 |
| 6708072 | Remote maintenance method, industrial device, and semiconductor device | Juntaro Arima, Masaaki Inaba, Takeiki Aizono | 2004-03-16 |
| 6627888 | Scanning electron microscope | Satoru Yamaguchi, Osamu Komuro, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima +1 more | 2003-09-30 |
| 4907287 | Image correction system for scanning electron microscope | Koichi Homma, Fuminobu Komura, Tetsuo Yokoyama, Koichi Haruna, Toshihiro Furuya +3 more | 1990-03-06 |