Issued Patents All Time
Showing 26–50 of 109 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8455850 | Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light | Yoshifumi Ueno, Youichi Sasaki, Osamu Wakabayashi | 2013-06-04 |
| 8436328 | Extreme ultraviolet light source apparatus | Tatsuya Yanagida, Hiroshi Komori, Shinji Nagai, Kouji Kakizaki, Tamotsu Abe +1 more | 2013-05-07 |
| 8399867 | Extreme ultraviolet light source apparatus | Shinji Nagai, Kouji Kakizaki, Osamu Wakabayashi, Yoshifumi Ueno | 2013-03-19 |
| 8324601 | Extreme ultra violet light source apparatus | Hideo Hoshino, Tamotsu Abe | 2012-12-04 |
| 8288743 | Apparatus for and method of withdrawing ions in EUV light production apparatus | Yoshifumi Ueno, Osamu Wakabayashi, Tamotsu Abe, Akira Sumitani, Hideo Hoshino +1 more | 2012-10-16 |
| 8273919 | Compound, synthesis method thereof, and oil additive | Kimihiko Urata | 2012-09-25 |
| 8164076 | Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light | Yoshifumi Ueno, Youichi Sasaki, Osamu Wakabayashi | 2012-04-24 |
| 8158959 | Extreme ultraviolet light source apparatus | Takeshi Asayama, Kouji Kakizaki, Shinji Nagai | 2012-04-17 |
| 8093571 | Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device and method for controlling saturable absorber used in extreme ultraviolet light source device | Krzysztof Nowak, Hideo Hoshino, Tatsuya Ariga, Masato Moriya, Osamu Wakabayashi | 2012-01-10 |
| 8077645 | Wireless communication terminal, semiconductor device, data communication method, and wireless communication system | Tadashi Fukami | 2011-12-13 |
| 8067756 | Extreme ultraviolet light source apparatus | Yoshifumi Ueno, Georg Soumagne, Shinji Nagai, Tatsuya Yanagida | 2011-11-29 |
| 8000361 | Laser system | Tamotsu Abe, Hideo Hoshino, Osamu Wakabayashi, Kouji Kakizaki | 2011-08-16 |
| 7938520 | Ink-jet recording apparatus | Masashi Tsuda, Kazuma Goto | 2011-05-10 |
| 7903715 | Slab type laser apparatus | Krzysztof Nowak, Takashi Suganuma, Osamu Wakabayashi | 2011-03-08 |
| 7842937 | Extreme ultra violet light source apparatus | Hideo Hoshino, Tamotsu Abe | 2010-11-30 |
| 7781369 | Mesoporous silica thick-film, process for producing the same, adsorption apparatus and adsorbing film | Hideyuki Negishi, Masaru Nakaiwa, Hiroshi YANAGISHITA | 2010-08-24 |
| 7705333 | Extreme ultra violet light source apparatus | Hiroshi Komori | 2010-04-27 |
| 7680158 | LPP type extreme ultra violet light source apparatus and driver laser for the same | Tatsuya Ariga, Takashi Suganuma, Taisuke Miura | 2010-03-16 |
| 7649188 | LPP type extreme ultra violet light source apparatus and driver laser for the same | Tatsuya Ariga, Takashi Suganuma, Taisuke Miura | 2010-01-19 |
| 7499340 | Semiconductor memory device and defect remedying method thereof | Kazuhiko Kajigaya, Kazuyuki Miyazawa, Manabu Tsunozaki, Kazuyoshi Oshima, Takashi Yamazaki +17 more | 2009-03-03 |
| 7345929 | Semiconductor memory device and defect remedying method thereof | Kazuhiko Kajigaya, Kazuyuki Miyazawa, Manabu Tsunozaki, Kazuyoshi Oshima, Takashi Yamazaki +17 more | 2008-03-18 |
| 7297968 | Debris collector for EUV light generator | Hideo Hoshino | 2007-11-20 |
| 7203101 | Semiconductor memory device and defect remedying method thereof | Kazuhiko Kajigaya, Kazuyuki Miyazawa, Manabu Tsunozaki, Kazuyoshi Oshima, Takashi Yamazaki +17 more | 2007-04-10 |
| 7067832 | Extreme ultraviolet light source | Hakaru Mizoguchi, Hirokazu Tanaka | 2006-06-27 |
| 7016236 | Semiconductor memory device and defect remedying method thereof | Kazuhiko Kajigaya, Kazuyuki Miyazawa, Manabu Tsunozaki, Kazuyoshi Oshima, Takashi Yamazaki +17 more | 2006-03-21 |