Issued Patents All Time
Showing 26–50 of 85 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9342878 | Charged particle beam apparatus | Kohei Yamaguchi, Fumihiko Fukunaga | 2016-05-17 |
| 9342879 | Method and apparatus for reviewing defect | Yohei Minekawa, Kenji Nakahira, Minoru Harada, Ryo Nakagaki | 2016-05-17 |
| 9335277 | Region-of-interest determination apparatus, observation tool or inspection tool, region-of-interest determination method, and observation method or inspection method using region-of-interest determination method | Ryo Nakagaki, Kenji Obara | 2016-05-10 |
| 9311697 | Inspection method and device therefor | Minoru Harada, Ryo Nakagaki, Naoki Hosoya | 2016-04-12 |
| 9305343 | Observation device and observation method | Kenji Nakahira, Atsushi Miyamoto | 2016-04-05 |
| 9280814 | Charged particle beam apparatus that performs image classification assistance | Kenji Obara, Kozo Miyake | 2016-03-08 |
| 9177757 | Charged particle beam apparatus | Naoma Ban, Kenji Obara | 2015-11-03 |
| 9165356 | Defect inspection method and defect inspection device | Minoru Harada, Atsushi Miyamoto, Fumihiko Fukunaga | 2015-10-20 |
| 9148631 | Defect inspection method and device therefor | Makoto Ono, Takafumi Chida, Masakazu Kanezawa | 2015-09-29 |
| 9136189 | Surface observation apparatus and surface observation method | Kenji Obara, Naoma Ban | 2015-09-15 |
| 9082585 | Defect observation method and device using SEM | Go Kotaki, Atsushi Miyamoto, Ryo Nakagaki | 2015-07-14 |
| 9040937 | Charged particle beam apparatus | Kohei Yamaguchi, Ryo Nakagaki | 2015-05-26 |
| 9020237 | Method for optimizing observed image classification criterion and image classification apparatus | Kozo Miyake, Junko Konishi | 2015-04-28 |
| 8892494 | Device for classifying defects and method for adjusting classification | Makoto Ono, Yohei Minekawa, Junko Konishi, Yuya Isomae | 2014-11-18 |
| 8824773 | Defect observation method and defect observation device | Yohei Minekawa, Ryo Nakagaki, Kenji Nakahira, Katsuhiro Kitahashi | 2014-09-02 |
| 8779360 | Charged particle beam device, defect observation device, and management server | Kozo Miyake, Junko Konishi, Kenji Obara | 2014-07-15 |
| 8653456 | Pattern inspection method, pattern inspection program, and electronic device inspection system | Yasutaka Toyoda, Tomohiro Funakoshi | 2014-02-18 |
| 8595666 | Semiconductor defect classifying method, semiconductor defect classifying apparatus, and semiconductor defect classifying program | Koichi Hayakawa, Yutaka Tandai, Tamao Ishikawa, Tsunehiro Sakai, Kazuhisa Hasumi +3 more | 2013-11-26 |
| 8526710 | Defect review method and apparatus | Ryo Nakagaki, Minoru Harada | 2013-09-03 |
| 8341518 | Report format setting method and apparatus, and defect review system | — | 2012-12-25 |
| 8330248 | Semiconductor device, mask for fabrication of semiconductor device, and optical proximity correction method | Yasuko Tabata, Akio Misaka, Hideyuki Arai, Yuji Nonami | 2012-12-11 |
| 8309919 | Inspection method for semiconductor wafer and apparatus for reviewing defects | Kenji Obara | 2012-11-13 |
| 8139847 | Defect inspection tool and method of parameter tuning for defect inspection tool | Kohei Yamaguchi, Kenji Obara | 2012-03-20 |
| 8108172 | Defect review apparatus and method of reviewing defects | Kenji Obara, Kohei Yamaguchi | 2012-01-31 |
| 8036845 | Method of correcting coordinates, and defect review apparatus | Kazuo Aoki, Kumi Kaneko | 2011-10-11 |