Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7462563 | Method of forming an etch indicator layer for reducing etch non-uniformities | Frank Feustel, Kai Frohberg | 2008-12-09 |
| 7085300 | Integral vertical cavity surface emitting laser and power monitor | James K. Guenter | 2006-08-01 |
| 7030044 | Method of forming a cap layer having anti-reflective characteristics on top of a low-k dielectric | Hartmut Ruelke, Joerg Hohage, Frank Mauersberger | 2006-04-18 |
| 7022602 | Nitrogen-enriched low-k barrier layer for a copper metallization layer | Hartmut Ruelke, Joerg Hohage, Michael Kiene | 2006-04-04 |
| 6964874 | Void formation monitoring in a damascene process | Peter Hübler, Frank Koschinsky | 2005-11-15 |
| 6893956 | Barrier layer for a copper metallization layer including a low-k dielectric | Hartmut Ruelke, Joerg Hohage, Massud Aminpur | 2005-05-17 |
| 6867610 | Test structure for determining the stability of electronic devices comprising connected substrates | Mathias Bottcher | 2005-03-15 |
| 6724096 | Die corner alignment structure | Gunter Grasshoff, Bernd Schulz, Carsten Hartig | 2004-04-20 |
| 6228758 | Method of making dual damascene conductive interconnections and integrated circuit device comprising same | John G. Pellerin | 2001-05-08 |
| 5976948 | Process for forming an isolation region with trench cap | Robert Dawson | 1999-11-02 |
| 4454495 | Layered ultra-thin coherent structures used as electrical resistors having low temperature coefficient of resistivity | Charles M. Falco, Ivan K. Schuller | 1984-06-12 |