Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6964874 | Void formation monitoring in a damascene process | Thomas Werner, Frank Koschinsky | 2005-11-15 | $25,400,000 |
| 6806191 | Semiconductor device with a copper line having an increased resistance against electromigration and a method of forming the same | Christian Zistl, Jörg Hohage, Hartmut Rülke | 2004-10-19 | $2,591,000 |
| 6716650 | Interface void monitoring in a damascene process | Eckhard Langer, Frank Koschinsky, Volker Kahlert | 2004-04-06 | $3,021,000 |
| 6613660 | Metallization process sequence for a barrier metal layer | Volker Kahlert, Frank Koschinsky | 2003-09-02 | $4,831,000 |