| 12122223 |
Vehicle |
Thomas Liepold |
2024-10-22 |
| 7030044 |
Method of forming a cap layer having anti-reflective characteristics on top of a low-k dielectric |
Hartmut Ruelke, Joerg Hohage, Thomas Werner |
2006-04-18 |
| 6958247 |
Method of electroplating copper over a patterned dielectric layer to enhance process uniformity of a subsequent CMP process |
Gerd Marxsen, Axel Preusse, Markus Nopper |
2005-10-25 |
| 6809032 |
Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operation using optical techniques |
Peter J. Beckage, Paul R. Besser, Frederick N. Hause, Errol Todd Ryan, William S. Brennan +1 more |
2004-10-26 |
| 6555479 |
Method for forming openings for conductive interconnects |
Frederick N. Hause, Paul R. Besser, Errol Todd Ryan, William S. Brennan, John A. Iacoponi +1 more |
2003-04-29 |
| 6514858 |
Test structure for providing depth of polish feedback |
Frederick N. Hause, Paul R. Besser, Errol Todd Ryan, William S. Brennan, John A. Iacoponi +1 more |
2003-02-04 |
| 6489240 |
Method for forming copper interconnects |
John A. Iacoponi, Paul R. Besser, Frederick N. Hause, Errol Todd Ryan, William S. Brennan +1 more |
2002-12-03 |
| 6413846 |
Contact each methodology and integration scheme |
Paul R. Besser, Errol Todd Ryan, Frederick N. Hause, William S. Brennan, John A. Iacoponi +1 more |
2002-07-02 |